Abstract: Disclosed is an apparatus that comprises a photo-acoustic transceiver which outputs, through a laser generator, a laser pulse output toward an object to be examined, and receives, through an ultrasonic wave receiver, an ultrasonic wave image signal from the object to be examined; an analog-to-digital converter which receives the ultrasonic wave image signal and converts same into a digital image signal; a main control unit which receives the digital image signal to generate ultrasonic wave scanning three-dimensional image information about the object to be examined; and a trigger control unit which receives motion information of a photo-acoustic probe to generate a scanning trigger signal corresponding to the motion information, receives laser pulse output information to generate a laser trigger signal corresponding to the laser pulse output, and generates an output trigger signal corresponding to the laser trigger signal and outputs same to the analog-to-digital converter.

Abstract: A flow rate control system including a flow rate controller controlling a flow rate of a fluid supplied to a controlled object to keep a desired flow rate set value is provided, and includes a flow rate sensor, a pressure sensor measuring a pressure of a primary side of the flow rate controller, a PI calibration value determination unit determining a PI calibration value based on at least a physical property coefficient according to a physical property value of the fluid, a correction unit correcting an estimated flow rate, based on the PI calibration value and a measured value, and a drive control circuit adjusting an opening of a valve supplying the fluid to the controlled object based on the estimated value and controlling the flow rate of the fluid. A flow rate is accurately calculated regardless of types of a fluid in the pressure insensitive type flow rate controller.

Abstract: A flow rate control system including a flow rate controller controlling a flow rate of a fluid supplied to a controlled object to keep a desired flow rate set value is provided, and includes a flow rate sensor, a pressure sensor measuring a pressure of a primary side of the flow rate controller, a PI calibration value determination unit determining a PI calibration value based on at least a physical property coefficient according to a physical property value of the fluid, a correction unit correcting an estimated flow rate, based on the PI calibration value and a measured value, and a drive control circuit adjusting an opening of a valve supplying the fluid to the controlled object based on the estimated value and controlling the flow rate of the fluid. A flow rate is accurately calculated regardless of types of a fluid in the pressure insensitive type flow rate controller.