Patents by Inventor Vance E. Armour

Vance E. Armour has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mechanically stabilized retaining ring for chemical mechanical polishing
    Patent number: 6068548
    Abstract: A carrier assembly for chemical mechanical polishing (CMP) includes a retaining ring removably attached to a rigid backing plate. The backing plate provides mechanical support over the entire load bearing surface of the retaining ring. In a further aspect of the present invention, a flexure clamp ring independent of the retaining ring for removably attaching the backing plate to the carrier assembly base Is included as part of the carrier assembly.
    Type: Grant
    Filed: December 17, 1997
    Date of Patent: May 30, 2000
    Assignee: Intel Corporation
    Inventors: Marion C. Vote, Vance E. Armour