Patents by Inventor Vance E. Hoffman

Vance E. Hoffman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Collimated deposition apparatus and method
    Patent number: 5635036
    Abstract: Sputtering apparatus and method which are particularly suitable for forming step coatings. A workpiece is supported in a chamber, particles are emitted from a sputter source in a substantially uniform manner throughout an area of greater lateral extent than the workpiece, the pressure within the chamber is maintained at a level which is sufficiently low to prevent substantial scattering of the particles between the source and the workpiece, and the particles are passed through a collimating filter having a plurality of transmissive cells with a length to diameter ratio on the order of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles at which the particles can impinge upon the workpiece.
    Type: Grant
    Filed: October 8, 1993
    Date of Patent: June 3, 1997
    Assignee: Varian Associates, Inc.
    Inventors: R. Ernest Demaray, Vance E. Hoffman, John C. Helmer, Young H. Park, Ronald R. Cochran
  • Collimated deposition apparatus and method
    Patent number: 5330628
    Abstract: Sputtering apparatus and method which are particularly suitable for forming step coatings. A workpiece is supported in a chamber, particles are emitted from a sputter source in a substantially uniform manner throughout an area of greater lateral extent than the workpiece, the pressure within the chamber is maintained at a level which is sufficiently low to prevent substantial scattering of the particles between the source and the workpiece, and the particles are passed through a collimating filter having a plurality of transmissive cells with a length to diameter ratio on the order of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles at which the particles can impinge upon the workpiece.
    Type: Grant
    Filed: October 23, 1991
    Date of Patent: July 19, 1994
    Assignee: Varian Associates, Inc.
    Inventors: R. Ernest Demaray, Vance E. Hoffman, John C. Helmer, Young H. Park, Ronald R. Cochran