Patents by Inventor Vassili M. Kitch

Vassili M. Kitch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of wafer temperature measurement
    Patent number: 6247842
    Abstract: A method for determining the temperature of a wafer during processing is disclosed. A test wafer is specially prepared in conjunction with a calibration chart. The difference in stack sheet resistance of the test wafer before and after processing is plotted onto the calibration chart to determine the temperature of the test wafer during processing.
    Type: Grant
    Filed: June 15, 1999
    Date of Patent: June 19, 2001
    Assignee: National Semiconductor Corporation
    Inventors: Vassili M. Kitch, Kevin C. Brown, Joost J. Vlassak