Patents by Inventor Vaughn R. Deline

Vaughn R. Deline has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Self-forming metal barriers
    Patent number: 9564356
    Abstract: A technique includes applying a liquid dielectric composition onto a substrate, where the composition includes metal ions, at least partially curing the composition to form a dielectric layer with the metal ions, patterning the dielectric layer to form electron-rich regions at a surface thereof, heating the patterned dielectric layer to drive the metal ions to the electron-rich regions thereof, thereby forming a metal barrier layer on at least a portion of the surface of the dielectric layer, and depositing one or more metal layers onto the metal barrier layer.
    Type: Grant
    Filed: April 16, 2015
    Date of Patent: February 7, 2017
    Assignee: International Business Machines Corporation
    Inventors: Vaughn R. Deline, Geraud J. Dubois, Willi Volksen
  • SELF-FORMING METAL BARRIERS
    Publication number: 20160307794
    Abstract: A technique includes applying a liquid dielectric composition onto a substrate, where the composition includes metal ions, at least partially curing the composition to form a dielectric layer with the metal ions, patterning the dielectric layer to form electron-rich regions at a surface thereof, heating the patterned dielectric layer to drive the metal ions to the electron-rich regions thereof, thereby forming a metal barrier layer on at least a portion of the surface of the dielectric layer, and depositing one or more metal layers onto the metal barrier layer.
    Type: Application
    Filed: April 16, 2015
    Publication date: October 20, 2016
    Inventors: Vaughn R. Deline, Geraud J. Dubois, Willi Volksen