Patents by Inventor Veera Raghava Reddy
Veera Raghava Reddy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11951590Abstract: Embodiments herein generally relate to polishing pads and methods of forming polishing pads. A polishing pad includes a plurality of polishing elements and a plurality of grooves disposed between the polishing elements. Each polishing element includes a plurality of individual posts. Each post includes an individual surface that forms a portion of a polishing surface of the polishing pad and one or more sidewalls extending downwardly from the individual surface. The sidewalls of the plurality of individual posts define a plurality of pores disposed between the posts.Type: GrantFiled: June 14, 2021Date of Patent: April 9, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Shiyan Akalanka Jayanath Wewala Gonnagahadeniyage, Ashwin Chockalingam, Jason Garcheung Fung, Veera Raghava Reddy Kakireddy, Nandan Baradanahalli Kenchappa, Puneet Narendra Jawali, Rajeev Bajaj
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Publication number: 20240025009Abstract: Polishing pads having discrete and selectively arranged regions of varying porosity within a continuous phase of polymer material are provided herein. In one embodiment a polishing pad features a plurality of polishing elements each comprising a polishing surface and sidewalls extending downwardly from the polishing surface to define a plurality of channels disposed between the polishing elements, wherein one or more of the polishing elements is formed of a continuous phase of polymer material having one or more first regions comprising a first porosity and a second region comprising a second porosity, wherein the second porosity is less than the first porosity.Type: ApplicationFiled: October 5, 2023Publication date: January 25, 2024Inventors: Aniruddh Jagdish KHANNA, Jason G. FUNG, Puneet Narendra JAWALI, Rajeev BAJAJ, Adam Wade MANZONIE, Nandan BARADANAHALLI KENCHAPPA, Veera Raghava Reddy KAKIREDDY, Joonho AN, Jaeseok KIM, Mayu YAMAMURA
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Patent number: 11878389Abstract: Embodiments of the present disclosure generally relate to structures formed using an additive manufacturing process, and more particularly, to polishing pads, and methods for manufacturing polishing pads, which may be used in a chemical mechanical polishing (CMP) process. The structures described herein are formed from a plurality of printed layers. The structure comprises a first material domain having a first material composition and a plurality of second material domains having a second material composition different from the first material composition. The first material domain is configured to have a first rate of removal and the plurality of second material domains are configured to have a different second rate of removal when an equivalent force is applied to a top surface of the first material domain and the plurality of second material domains.Type: GrantFiled: February 10, 2021Date of Patent: January 23, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Puneet Narendra Jawali, Veera Raghava Reddy Kakireddy, Rajeev Bajaj, Daniel Redfield
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Patent number: 11813712Abstract: Polishing pads having discrete and selectively arranged regions of varying porosity within a continuous phase of polymer material are provided herein. In one embodiment a polishing pad features a plurality of polishing elements each comprising a polishing surface and sidewalls extending downwardly from the polishing surface to define a plurality of channels disposed between the polishing elements, wherein one or more of the polishing elements is formed of a continuous phase of polymer material having one or more first regions comprising a first porosity and a second region comprising a second porosity, wherein the second porosity is less than the first porosity.Type: GrantFiled: September 29, 2020Date of Patent: November 14, 2023Assignee: Applied Materials, Inc.Inventors: Aniruddh Jagdish Khanna, Jason G. Fung, Puneet Narendra Jawali, Rajeev Bajaj, Adam Wade Manzonie, Nandan Baradanahalli Kenchappa, Veera Raghava Reddy Kakireddy, Joonho An, Jaeseok Kim, Mayu Yamamura
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Patent number: 11724362Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: GrantFiled: December 8, 2020Date of Patent: August 15, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Rajeev Bajaj, Daniel Redfield, Mahendra C. Orilall, Boyi Fu, Aniruddh Jagdish Khanna, Jason G. Fung, Ashwin Chockalingam, Mayu Yamamura, Veera Raghava Reddy Kakireddy, Gregory E. Menk, Nag B. Patibandla
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Publication number: 20220395958Abstract: Embodiments herein generally relate to polishing pads and methods of forming polishing pads. A polishing pad includes a plurality of polishing elements and a plurality of grooves disposed between the polishing elements. Each polishing element includes a plurality of individual posts. Each post includes an individual surface that forms a portion of a polishing surface of the polishing pad and one or more sidewalls extending downwardly from the individual surface. The sidewalls of the plurality of individual posts define a plurality of pores disposed between the posts.Type: ApplicationFiled: June 14, 2021Publication date: December 15, 2022Inventors: Shiyan Akalanka Jayanath WEWALA GONNAGAHADENIYAGE, Ashwin CHOCKALINGAM, Jason Garcheung FUNG, Veera Raghava Reddy KAKIREDDY, Nandan BARADANAHALLI KENCHAPPA, Puneet Narendra JAWALI, Rajeev BAJAJ
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Publication number: 20220250203Abstract: Embodiments of the present disclosure generally relate to structures formed using an additive manufacturing process, and more particularly, to polishing pads, and methods for manufacturing polishing pads, which may be used in a chemical mechanical polishing (CMP) process. The structures described herein are formed from a plurality of printed layers. The structure comprises a first material domain having a first material composition and a plurality of second material domains having a second material composition different from the first material composition. The first material domain is configured to have a first rate of removal and the plurality of second material domains are configured to have a different second rate of removal when an equivalent force is applied to a top surface of the first material domain and the plurality of second material domains.Type: ApplicationFiled: February 10, 2021Publication date: August 11, 2022Inventors: Puneet Narendra JAWALI, Veera Raghava Reddy KAKIREDDY, Rajeev BAJAJ, Daniel REDFIELD
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Publication number: 20210187693Abstract: Polishing pads having discrete and selectively arranged regions of varying porosity within a continuous phase of polymer material are provided herein. In one embodiment a polishing pad features a plurality of polishing elements each comprising a polishing surface and sidewalls extending downwardly from the polishing surface to define a plurality of channels disposed between the polishing elements, wherein one or more of the polishing elements is formed of a continuous phase of polymer material having one or more first regions comprising a first porosity and a second region comprising a second porosity, wherein the second porosity is less than the first porosity.Type: ApplicationFiled: September 29, 2020Publication date: June 24, 2021Inventors: Aniruddh Jagdish KHANNA, Jason G. FUNG, Puneet Narendra JAWALI, Rajeev BAJAJ, Adam Wade MANZONIE, Nandan BARADANAHALLI KENCHAPPA, Veera Raghava Reddy KAKIREDDY, Joonho AN, Jaeseok KIM, Mayu YAMAMURA
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Publication number: 20210107116Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: ApplicationFiled: December 8, 2020Publication date: April 15, 2021Inventors: Rajeev BAJAJ, Daniel REDFIELD, Mahendra C. ORILALL, Boyi FU, Aniruddh Jagdish KHANNA, Jason G. FUNG, Ashwin CHOCKALINGAM, Mayu YAMAMURA, Veera Raghava Reddy KAKIREDDY, Gregory E. MENK, Nag B. PATIBANDLA
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Patent number: 10875145Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: GrantFiled: October 22, 2015Date of Patent: December 29, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Rajeev Bajaj, Daniel Redfield, Mahendra C. Orilall, Boyi Fu, Aniruddh Khanna, Jason G. Fung, Mario Cornejo, Ashwin Chockalingam, Mayu Yamamura, Veera Raghava Reddy Kakireddy, Ashavani Kumar, Venkat Hariharan, Gregory E. Menk, Fred C. Redeker, Nag B. Patibandla, Hou T. Ng, Robert E. Davenport, Amritanshu Sinha
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Patent number: 10821573Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: GrantFiled: October 19, 2015Date of Patent: November 3, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Rajeev Bajaj, Daniel Redfield, Mahendra C. Orilall, Boyi Fu, Aniruddh Khanna, Jason G. Fung, Mario Cornejo, Ashwin Chockalingam, Mayu Yamamura, Veera Raghava Reddy Kakireddy, Ashavani Kumar, Venkat Hariharan, Gregory E. Menk, Fred C. Redeker, Nag B. Patibandla, Hou T. Ng, Robert E. Davenport, Amritanshu Sinha
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Patent number: 10786885Abstract: A method and apparatus for polishing a substrate that includes a polishing article comprising a polymeric sheet having a raised surface texture, which is formed on the surface of the polymeric sheet is provided. According to one or more implementations of the present disclosure, an advanced polishing article has been developed, which does not require abrasive pad conditioning. In some implementations of the present disclosure, the advanced polishing article comprises a polymeric sheet having a polishing surface with a raised surface texture or “micro-features” and/or a plurality of grooves or “macro-features” formed in the polishing surface. In some implementations, the raised surface texture is embossed, etched, machined or otherwise formed in the polishing surface prior to installing and using the advanced polishing article in a polishing system. In one implementation, the raised features have a height within one order of magnitude of the features removed from the substrate during polishing.Type: GrantFiled: January 19, 2018Date of Patent: September 29, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Robert D. Tolles, Gregory E. Menk, Eric Davey, You Wang, Huyen Karen Tran, Fred C. Redeker, Veera Raghava Reddy Kakireddy, Ekaterina Mikhaylichenko, Jay Gurusamy
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Patent number: 10384330Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: GrantFiled: October 16, 2015Date of Patent: August 20, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Rajeev Bajaj, Daniel Redfield, Mahendra C. Orilall, Boyi Fu, Aniruddh Khanna, Jason G. Fung, Mario Cornejo, Ashwin Chockalingam, Mayu Yamamura, Veera Raghava Reddy Kakireddy, Ashavani Kumar, Venkat Hariharan, Gregory E. Menk, Fred C. Redeker, Nag B. Patibandla, Hou T. Ng, Robert E. Davenport, Amritanshu Sinha
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Publication number: 20180207770Abstract: A method and apparatus for polishing a substrate that includes a polishing article comprising a polymeric sheet having a raised surface texture, which is formed on the surface of the polymeric sheet is provided. According to one or more implementations of the present disclosure, an advanced polishing article has been developed, which does not require abrasive pad conditioning. In some implementations of the present disclosure, the advanced polishing article comprises a polymeric sheet having a polishing surface with a raised surface texture or “micro-features” and/or a plurality of grooves or “macro-features” formed in the polishing surface. In some implementations, the raised surface texture is embossed, etched, machined or otherwise formed in the polishing surface prior to installing and using the advanced polishing article in a polishing system. In one implementation, the raised features have a height within one order of magnitude of the features removed from the substrate during polishing.Type: ApplicationFiled: January 19, 2018Publication date: July 26, 2018Inventors: Robert D. TOLLES, Gregory E. MENK, Eric DAVEY, You WANG, Huyen Karen TRAN, Fred C. REDEKER, Veera Raghava Reddy KAKIREDDY, Ekaterina MIKHAYLICHENKO, Jay GURUSAMY
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Publication number: 20160114458Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: ApplicationFiled: October 22, 2015Publication date: April 28, 2016Inventors: Rajeev BAJAJ, Daniel REDFIELD, Mahendra C. ORILALL, Boyi FU, Aniruddh KHANNA, Jason G. FUNG, Mario CORNEJO, Ashwin CHOCKALINGAM, Mayu YAMAMURA, Veera Raghava REDDY, Ashavani KUMAR, Venkatachalam HARIHARAN, Gregory E. MENK, Fred C. REDEKER, Nag B. PATIBANDLA, Hou T. NG, Robert E. DAVENPORT, Amritanshu SINHA
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Publication number: 20160107295Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: ApplicationFiled: October 16, 2015Publication date: April 21, 2016Inventors: Rajeev BAJAJ, Daniel REDFIELD, Mahendra C. ORILALL, Boyi FU, Aniruddh KHANNA, Jason G. FUNG, Mario CORNEJO, Ashwin CHOCKALINGAM, Mayu YAMAMURA, Veera Raghava Reddy KAKIREDDY, Ashavani KUMAR, Venkatachalam HARIHARAN, Gregory E. MENK, Fred C. REDEKER, Nag B. PATIBANDLA, Hou T. NG, Robert E. DAVENPORT, Amritanshu SINHA
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Publication number: 20160107287Abstract: Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.Type: ApplicationFiled: October 19, 2015Publication date: April 21, 2016Inventors: Rajeev BAJAJ, Daniel REDFIELD, Mahendra C. ORILALL, Boyi FU, Aniruddh KHANNA, Jason G. FUNG, Mario CORNEJO, Ashwin CHOCKALINGAM, Mayu YAMAMURA, Veera Raghava Reddy KAKIREDDY, Ashavani KUMAR, Venkatachalam HARIHARAN, Gregory E. MENK, Fred C. REDEKER, Nag B. PATIBANDLA, Hou T. NG, Robert E. DAVENPORT, Amritanshu SINHA
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Patent number: 8762304Abstract: A policy scheduler scheduling a policy is provided. The policy scheduler receives the policy for a system and information of a current state of the system. The policy scheduler evaluates one or more rules based on the current state of the system and generates a new rule via an evolutionary algorithm based on the information of the current state of the system. The policy scheduler adds the newly generated rule into the one or more rules and schedules the policy based on the one or more rules including the newly generated rule.Type: GrantFiled: January 4, 2010Date of Patent: June 24, 2014Assignee: Hewlett-Packard Development Company, L.P.Inventors: Siddalingaprabhu Amareshappa Chitapur, Kiran Joseph Almeida, Sridhar Bommaiah, Veera Raghava Reddy
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Patent number: 8275853Abstract: Presented is a method and system for a service intermediary selection in a web service management system. The method comprises: receiving a service request by the web service management system; and selecting the service intermediary from a plurality of service intermediaries by a planning module of the web service management system.Type: GrantFiled: March 13, 2009Date of Patent: September 25, 2012Assignee: Hewlett-Packard Development Company, L.P.Inventors: Kiran Joseph Almeida, Veera Raghava Reddy, Birur Keshavarao Sudhanva Bhandolkar
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Publication number: 20100191796Abstract: Presented is a method and system for a service intermediary selection in a web service management system. The method comprises: receiving a service request by the web service management system; and selecting the service intermediary from a plurality of service intermediaries by a planning module of the web service management system.Type: ApplicationFiled: March 13, 2009Publication date: July 29, 2010Inventors: Kiran Joseph ALMEIDA, Veera Raghava Reddy, Birur Keshavarao Sudhanva Bhandolkar