Patents by Inventor Velislava IGNATOVA

Velislava IGNATOVA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
    Publication number: 20220027437
    Abstract: A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.
    Type: Application
    Filed: October 7, 2021
    Publication date: January 27, 2022
    Applicant: ASML Netherlands B.V.
    Inventors: Everhardus Cornelis MOS, Velislava IGNATOVA, Erik JENSEN, Michael KUBIS, Hubertus Johannes Gertrudus SIMONS, Peter TEN BERGE, Erik Johannes Maria WALLERBOS, Jochem Sebastiaan WILDENBERG
  • Method and apparatus for inspection and metrology
    Patent number: 11170072
    Abstract: A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: November 9, 2021
    Assignee: ASML Netherands B.V.
    Inventors: Everhardus Cornelis Mos, Velislava Ignatova, Erik Jensen, Michael Kubis, Hubertus Johannes Gertrudus Simons, Peter Ten Berge, Erik Johannes Maria Wallerbos, Jochem Sebastiaan Wildenberg
  • METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
    Publication number: 20180067900
    Abstract: A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.
    Type: Application
    Filed: March 25, 2016
    Publication date: March 8, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Everhardus Cornelis MOS, Velislava IGNATOVA, Erik JENSEN, Michael KUBIS, Hubertus Johannes Gertrudus SIMONS, Peter TEN BERGE, Erik Johannes Maria WALLERBOS, Jochem Sebastiaan WILDENBERG