Abstract: Methods and systems for monitoring etch or deposition processes using image-based in-situ process monitoring techniques include illuminating a measurement area on a sample disposed in a process chamber. The measurement area is illuminated using an input beam generated remote from the process chamber and transmitted to a first viewing window of the process chamber by a first optical fiber. Portions of the first input beam reflected from the measurement area are transmitted from the first viewing window to an imaging sensor by a second optical fiber. A sequence of images is obtained at the imaging sensor, and a change in reflectance of pixels within each of the images is determined. The etch or deposition process is monitored based on the change in reflectance.

Abstract: Methods and systems for monitoring etch or deposition processes using image-based in-situ process monitoring techniques include illuminating a measurement area on a sample disposed in a process chamber. The measurement area is illuminated using an input beam generated remote from the process chamber and transmitted to a first viewing window of the process chamber by a first optical fiber. Portions of the first input beam reflected from the measurement area are transmitted from the first viewing window to an imaging sensor by a second optical fiber. A sequence of images is obtained at the imaging sensor, and a change in reflectance of pixels within each of the images is determined. The etch or deposition process is monitored based on the change in reflectance.

Abstract: A method includes identifying first structure data of a first region of a substrate and receiving optical metrology data of the substrate associated with one or more substrate deposition processes in a processing chamber. The method further includes determining, based on the optical metrology data and the first structure data, a first growth rate of the first region of the substrate associated with the one or more substrate deposition processes. The method further includes predicting, based on the optical metrology data and the first growth rate, thickness data of a second region of the substrate without second structure data of the second region.

Abstract: In some embodiments of SCAPE imaging systems, a Powell lens is used to expand light from a light source into a sheet of illumination light. An optical system sweeps the sheet of illumination light through a sample, and forms an image at an intermediate image plane from detected return light. A camera captures images of the intermediate image plane. In some embodiments of SCAPE imaging systems, an optical system sweeps the sheet of illumination light through a sample, and forms an image at an intermediate image plane from detected return light. A camera captures images of the intermediate image plane. In the latter embodiments, the optical system is deliberately misaligned with respect to a true alignment position so that a significant portion of light that would be lost at the true alignment position will arrive at the camera.

Abstract: In some embodiments of SCAPE imaging systems, a Powell lens is used to expand light from a light source into a sheet of illumination light. An optical system sweeps the sheet of illumination light through a sample, and forms an image at an intermediate image plane from detected return light. A camera captures images of the intermediate image plane. In some embodiments of SCAPE imaging systems, an optical system sweeps the sheet of illumination light through a sample, and forms an image at an intermediate image plane from detected return light. A camera captures images of the intermediate image plane. In the latter embodiments, the optical system is deliberately misaligned with respect to a true alignment position so that a significant portion of light that would be lost at the true alignment position will arrive at the camera.

Abstract: In a first SCAPE imaging system, a Powell lens (105) is used to expand light from a light source (100) into a sheet of illumination light. An optical system (125,131,132,140) sweeps the sheet of illumination light through a sample (145), and forms an image at a tilted intermediate image plane (170) from detected return light. A camera (190) captures images of the intermediate image plane. In a second SCAPE imaging system, an optical system (125,131,132,140) sweeps the sheet of illumination light through a sample (145), and forms an image at a tilted intermediate image plane (170) from detected return light. A camera (190) captures images of the intermediate image plane. The detection optics are deliberately misaligned with respect to a true alignment position so that a significant portion of light that would be lost at the true alignment position will arrive at the camera.

Abstract: A scanning element routes a sheet or beam of excitation light through a first set of optical components and into a sample at an oblique angle. The position of the excitation light within the sample varies depending on the orientation of the scanning element. Fluorophores within the sample emit fluorescent detection light. The first set of optical components route the detection light back to the scanning element, and the scanning element routes the detection light through a second set of optical components and into a camera. The second set of optical components includes a phase modulating element that induces a controlled aberration so as to homogenize point spread functions of points at, above, and below a focal plane when measured at the camera. In some embodiments, the images captured by the camera are processed to correct for aberration by performing deconvolution of a point spread function.

Abstract: A scanning element routes a sheet or beam of excitation light through a first set of optical components and into a sample at an oblique angle. The position of the excitation light within the sample varies depending on the orientation of the scanning element. Fluorophores within the sample emit fluorescent detection light. The first set of optical components route the detection light back to the scanning element, and the scanning element routes the detection light through a second set of optical components and into a camera. The second set of optical components includes a phase modulating element that induces a controlled aberration so as to homogenize point spread functions of points at, above, and below a focal plane when measured at the camera. In some embodiments, the images captured by the camera are processed to correct for aberration by performing deconvolution of a point spread function.

Abstract: In a first SCAPE imaging system, a Powell lens (105) is used to expand light from a light source (100) into a sheet of illumination light. An optical system (125,131,132,140) sweeps the sheet of illumination light through a sample (145), and forms an image at a tilted intermediate image plane (170) from detected return light. A camera (190) captures images of the intermediate image plane. In a second SCAPE imaging system, an optical system (125,131,132,140) sweeps the sheet of illumination light through a sample (145), and forms an image at a tilted intermediate image plane (170) from detected return light. A camera (190) captures images of the intermediate image plane. The detection optics are deliberately misaligned with respect to a true alignment position so that a significant portion of light that would be lost at the true alignment position will arrive at the camera.