Patents by Inventor Venkatesh Mohanakrishnaswamy
Venkatesh Mohanakrishnaswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8853802Abstract: A method that includes forming a first layer having a first dopant concentration, the first layer having an integrated circuit region and a micro-electromechanical region and doping the micro-electromechanical region of the first layer to have a second dopant concentration is presented. The method includes forming a second layer having a third dopant concentration overlying the first layer, doping the second layer that overlies the micro-electromechanical region to have a fourth dopant concentration, forming a micro-electromechanical structure in the micro-electromechanical region using the first and second layers, and forming active components in the integrated circuit region using the second layer.Type: GrantFiled: May 31, 2012Date of Patent: October 7, 2014Assignees: STMicroelectronics, Inc., STMicroelectronics Asia Pacific PTE, Ltd.Inventors: Venkatesh Mohanakrishnaswamy, Olivier Le Neel, Loi N. Nguyen
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Patent number: 8853850Abstract: A packaging scheme for MEMS device is provided. A method of packaging MEMS device in a semiconductor structure includes forming an insulation fence that surrounds the MEMS device on the semiconductor structure. The method further includes attaching a wafer of dielectric material to the insulation fence. The lid wafer, the insulation fence, and the semiconductor structure enclose the MEMS device.Type: GrantFiled: March 4, 2013Date of Patent: October 7, 2014Assignee: STMicroelectronics, Inc.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen, Venkata Ramana Yogi Mallela
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Patent number: 8680631Abstract: A method that includes forming an opening between at least one first electrode and a second electrode by forming a recess in a first electrode layer, the recess having sidewalls that correspond to a surface of the at least one first electrode, forming a first sacrificial layer on the sidewalls of the recess, the first sacrificial layer having a first width that corresponds to a second width of the opening, forming a second electrode layer in the recess that corresponds to the second electrode, and removing the first sacrificial layer to form the opening between the second electrode and the at least one first electrode.Type: GrantFiled: April 12, 2013Date of Patent: March 25, 2014Assignee: STMicroelectronics, Inc.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen
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Publication number: 20130228881Abstract: A method that includes forming an opening between at least one first electrode and a second electrode by forming a recess in a first electrode layer, the recess having sidewalls that correspond to a surface of the at least one first electrode, forming a first sacrificial layer on the sidewalls of the recess, the first sacrificial layer having a first width that corresponds to a second width of the opening, forming a second electrode layer in the recess that corresponds to the second electrode, and removing the first sacrificial layer to form the opening between the second electrode and the at least one first electrode.Type: ApplicationFiled: April 12, 2013Publication date: September 5, 2013Applicant: STMicroelectronics, Inc.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen
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Patent number: 8432006Abstract: A method that includes forming an opening between at least one first electrode and a second electrode by forming a recess in a first electrode layer, the recess having sidewalls that correspond to a surface of the at least one first electrode, forming a first sacrificial layer on the sidewalls of the recess, the first sacrificial layer having a first width that corresponds to a second width of the opening, forming a second electrode layer in the recess that corresponds to the second electrode, and removing the first sacrificial layer to form the opening between the second electrode and the at least one first electrode.Type: GrantFiled: August 29, 2011Date of Patent: April 30, 2013Assignee: STMicroelectronics, Inc.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen
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Patent number: 8405202Abstract: A packaging scheme for MEMS device is provided. A method of packaging MEMS device in a semiconductor structure includes forming an insulation fence that surrounds the MEMS device on the semiconductor structure. The method further includes attaching a wafer of dielectric material to the insulation fence. The lid wafer, the insulation fence, and the semiconductor structure enclose the MEMS device.Type: GrantFiled: December 31, 2009Date of Patent: March 26, 2013Assignee: STMicroelectronics, Inc.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen, Venkata Ramana Yogi Mallela
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Publication number: 20120235254Abstract: A method that includes forming a first layer having a first dopant concentration, the first layer having an integrated circuit region and a micro-electromechanical region and doping the micro-electromechanical region of the first layer to have a second dopant concentration is presented. The method includes forming a second layer having a third dopant concentration overlying the first layer, doping the second layer that overlies the micro-electromechanical region to have a fourth dopant concentration, forming a micro-electromechanical structure in the micro-electromechanical region using the first and second layers, and forming active components in the integrated circuit region using the second layer.Type: ApplicationFiled: May 31, 2012Publication date: September 20, 2012Applicants: STMICROELECTRONICS ASIA PACIFIC PTE, LTD., STMICROELECTRONICS, INC.Inventors: Venkatesh Mohanakrishnaswamy, Olivier Le Neel, Loi N. Nguyen
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Patent number: 8193595Abstract: A method that includes forming a first layer having a first dopant concentration, the first layer having an integrated circuit region and a micro-electromechanical region and doping the micro-electromechanical region of the first layer to have a second dopant concentration is presented. The method includes forming a second layer having a third dopant concentration overlying the first layer, doping the second layer that overlies the micro-electromechanical region to have a fourth dopant concentration, forming a micro-electromechanical structure in the micro-electromechanical region using the first and second layers, and forming active components in the integrated circuit region using the second layer.Type: GrantFiled: December 31, 2009Date of Patent: June 5, 2012Assignees: STMicroelectronics, Inc., STMicroelectronics Asia Pacific Pte Ltd.Inventors: Venkatesh Mohanakrishnaswamy, Olivier Le Neel, Loi N. Nguyen
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Publication number: 20120056281Abstract: A method that includes forming an opening between at least one first electrode and a second electrode by forming a recess in a first electrode layer, the recess having sidewalls that correspond to a surface of the at least one first electrode, forming a first sacrificial layer on the sidewalls of the recess, the first sacrificial layer having a first width that corresponds to a second width of the opening, forming a second electrode layer in the recess that corresponds to the second electrode, and removing the first sacrificial layer to form the opening between the second electrode and the at least one first electrode.Type: ApplicationFiled: August 29, 2011Publication date: March 8, 2012Applicant: STMICROELECTRONICS, INC.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen
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Patent number: 8022491Abstract: A method that includes forming an opening between at least one first electrode and a second electrode by forming a recess in a first electrode layer, the recess having sidewalls that correspond to a surface of the at least one first electrode, forming a first sacrificial layer on the sidewalls of the recess, the first sacrificial layer having a first width that corresponds to a second width of the opening, forming a second electrode layer in the recess that corresponds to the second electrode, and removing the first sacrificial layer to form the opening between the second electrode and the at least one first electrode.Type: GrantFiled: June 30, 2009Date of Patent: September 20, 2011Assignee: STMicroelectronics, Inc.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen
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Publication number: 20110156175Abstract: A method that includes forming a first layer having a first dopant concentration, the first layer having an integrated circuit region and a micro-electromechanical region and doping the micro-electromechanical region of the first layer to have a second dopant concentration is presented. The method includes forming a second layer having a third dopant concentration overlying the first layer, doping the second layer that overlies the micro-electromechanical region to have a fourth dopant concentration, forming a micro-electromechanical structure in the micro-electromechanical region using the first and second layers, and forming active components in the integrated circuit region using the second layer.Type: ApplicationFiled: December 31, 2009Publication date: June 30, 2011Applicants: STMICROELECTRONICS, INC., STMICROELECTRONICS ASIA PACIFIC PTE LTD.Inventors: Venkatesh Mohanakrishnaswamy, Olivier Le Neel, Loi N. Nguyen
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Embedded microelectromechanical systems (MEMS) semiconductor substrate and related method of forming
Patent number: 7943410Abstract: An embedded MEMS semiconductor substrate is set forth and can be a starting material for subsequent semiconductor device processing. A MEMS device is formed in a semiconductor substrate, including at least one MEMS electrode and a buried silicon dioxide sacrificial layer has been applied for releasing the MEMS. A planarizing layer is applied over the substrate, MEMS device and MEMS electrode. A polysilicon protection layer is applied over the planarizing layer. A silicon nitride capping layer is applied over the polysilicon protection layer. A polsilicon seed layer is applied over the polysilicon nitride capping layer. The MEMS device is released by removing at least a portion of the buried silicon dioxide sacrificial layer and an epitaxial layer is grown over the polysilicon seed layer to be used for subsequent semiconductor wafer processing.Type: GrantFiled: December 10, 2008Date of Patent: May 17, 2011Assignee: STMicroelectronics, Inc.Inventors: Olivier Le Neel, Peyman Sana, Loi Nguyen, Venkatesh Mohanakrishnaswamy -
Publication number: 20110042801Abstract: A packaging scheme for MEMS device is provided. A method of packaging MEMS device in a semiconductor structure includes forming an insulation fence that surrounds the MEMS device on the semiconductor structure. The method further includes attaching a wafer of dielectric material to the insulation fence. The lid wafer, the insulation fence, and the semiconductor structure enclose the MEMS device.Type: ApplicationFiled: December 31, 2009Publication date: February 24, 2011Applicant: STMICROELECTRONICS, INC.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen, Venkata Ramana Yogi Mallela
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Publication number: 20100164024Abstract: A method that includes forming an opening between at least one first electrode and a second electrode by forming a recess in a first electrode layer, the recess having sidewalls that correspond to a surface of the at least one first electrode, forming a first sacrificial layer on the sidewalls of the recess, the first sacrificial layer having a first width that corresponds to a second width of the opening, forming a second electrode layer in the recess that corresponds to the second electrode, and removing the first sacrificial layer to form the opening between the second electrode and the at least one first electrode.Type: ApplicationFiled: June 30, 2009Publication date: July 1, 2010Applicant: STMICROELECTRONICS, INC.Inventors: Venkatesh Mohanakrishnaswamy, Loi N. Nguyen
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EMBEDDED MICROELECTROMECHANICAL SYSTEMS (MEMS) SEMICONDUCTOR SUBSTRATE AND RELATED METHOD OF FORMING
Publication number: 20100140724Abstract: An embedded MEMS semiconductor substrate is set forth and can be a starting material for subsequent semiconductor device processing. A MEMS device is formed in a semiconductor substrate, including at least one MEMS electrode and a buried silicon dioxide sacrificial layer has been applied for releasing the MEMS. A planarizing layer is applied over the substrate, MEMS device and MEMS electrode. A polysilicon protection layer is applied over the planarizing layer. A polysilicon nitride capping layer is applied over the polysilicon protection layer. A polysilicon seed layer is applied over the polysilicon nitride capping layer. The MEMS device is released by removing at least a portion of the buried silicon dioxide sacrificial layer and an epitaxial layer is grown over the polysilicon seed layer to be used for subsequent semiconductor wafer processing.Type: ApplicationFiled: December 10, 2008Publication date: June 10, 2010Applicant: STMicroelectronics, Inc.Inventors: Olivier LE NEEL, Peyman Sana, Loi Nguyen, Venkatesh Mohanakrishnaswamy -
Embedded microelectromechanical systems (MEMS) semiconductor substrate and related method of forming
Patent number: RE45286Abstract: An embedded MEMS semiconductor substrate is set forth and can be a starting material for subsequent semiconductor device processing. A MEMS device is formed in a semiconductor substrate, including at least one MEMS electrode and a buried silicon dioxide sacrificial layer has been applied for releasing the MEMS. A planarizing layer is applied over the substrate, MEMS device and MEMS electrode. A polysilicon protection layer is applied over the planarizing layer. A silicon nitride capping layer is applied over the polysilicon protection layer. A polsilicon seed layer is applied over the polysilicon nitride capping layer. The MEMS device is released by removing at least a portion of the buried silicon dioxide sacrificial layer and an epitaxial layer is grown over the polysilicon seed layer to be used for subsequent semiconductor wafer processing.Type: GrantFiled: May 9, 2013Date of Patent: December 9, 2014Assignee: STMicroelectronics, Inc.Inventors: Olivier Le Neel, Peyman Sana, Loi Nguyen, Venkatesh Mohanakrishnaswamy