Patents by Inventor Venu VELLANKI

Venu VELLANKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process window optimizer
    Patent number: 9990451
    Abstract: Disclosed herein is a computer-implemented defect prediction method for a device manufacturing process involving processing a pattern onto a substrate, the method comprising: identifying a processing window limiting pattern (PWLP) from the pattern; determining a processing parameter under which the PWLP is processed; and determining or predicting, using the processing parameter, existence, probability of existence, a characteristic, or a combination thereof, of a defect produced from the PWLP with the device manufacturing process.
    Type: Grant
    Filed: February 9, 2015
    Date of Patent: June 5, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Stefan Hunsche, Venu Vellanki
  • PROCESS WINDOW OPTIMIZER
    Publication number: 20150227654
    Abstract: Disclosed herein is a computer-implemented defect prediction method for a device manufacturing process involving processing a pattern onto a substrate, the method comprising: identifying a processing window limiting pattern (PWLP) from the pattern; determining a processing parameter under which the PWLP is processed; and determining or predicting, using the processing parameter, existence, probability of existence, a characteristic, or a combination thereof, of a defect produced from the PWLP with the device manufacturing process.
    Type: Application
    Filed: February 9, 2015
    Publication date: August 13, 2015
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Stefan HUNSCHE, Venu VELLANKI