Patents by Inventor Venugopal B. Menon

Venugopal B. Menon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Submicron particle removal using liquid nitrogen
    Patent number: 5555902
    Abstract: Liquid nitrogen is introduced onto a surface of a semiconductor wafer to remove submicron particles from its surface. LN.sub.2 flows across the wafer surface wherein the surface tension of the liquid collects contaminant particles and removes them off the edge of the wafer.
    Type: Grant
    Filed: May 10, 1995
    Date of Patent: September 17, 1996
    Assignee: Sematech, Inc.
    Inventor: Venugopal B. Menon
  • Submicron particle removal using liquid nitrogen
    Patent number: 5456758
    Abstract: Liquid nitrogen is introduced onto a surface of a semiconductor wafer to remove submicron particles from its surface. LN.sub.2 flows across the wafer surface wherein the surface tension of the liquid collects contaminant particles and removes them off the edge of the wafer.
    Type: Grant
    Filed: April 26, 1993
    Date of Patent: October 10, 1995
    Assignee: Sematech, Inc.
    Inventor: Venugopal B. Menon
  • Process for detection of sub-micron particulate contamination on a bare (planar) substrate
    Patent number: 5061068
    Abstract: Particular contamination below about 0.3 microns in average diameter on an IC wafer substrate is detected by forming a film of a volatile liquid on the wafer's surface and observing interference patterns formed by particles during the evaporation process. These interference patterns magnify the "effective" particle size many times, making detection through an optical microscope possible.
    Type: Grant
    Filed: February 22, 1990
    Date of Patent: October 29, 1991
    Assignee: Research Triangle Institute
    Inventor: Venugopal B. Menon
  • Novel process for the production of ceramic flakes
    Patent number: 4920083
    Abstract: A method for the production of ceramic oxide lakes, comprising the steps of: (i) preparing a colloidal foam by blowing a gas into an aqueous solution comprising a precursor salt of said ceramic oxide flake and a surfactant; (ii) precipitating flakes of said precursor salt in said colloidal foam; and (iii) dry and calcining said precipitated flakes to produce said ceramic oxide flakes.
    Type: Grant
    Filed: May 18, 1988
    Date of Patent: April 24, 1990
    Assignee: Research Triangle Institute
    Inventor: Venugopal B. Menon