Abstract: Silane is removed from the exhaust gas of silicon CVD reactors by injecting a stoichiometric excess of halogen to produce halosilanes which are hydrolyzed in water. The removal method permits the use of small individual reactors at each CVD reactor site and eliminates the collection and transport of hazardous gases to a central disposal site for destruction.

Abstract: Gases containing solubles or suspended particles are mixed with a scrubbing liquid in a mixing apparatus having a chamber with a rotatable wheel mounted therein. The gas is mixed with a scrubbing liquid by the rotating wheel which has first and second scrubbing surfaces including vanes for creating turbulence and moving the gas through the chamber. The vanes on the first scrubbing surface increase in height from the axis of the wheel to its periphery to move gas radially outwardly. The vanes on the second scrubbing surface increase in height from the periphery to the axis of the wheel to move the gas radially inwardly.

Abstract: Gases containing solubles or suspended particles are mixed with a scrubbing liquid in a mixing apparatus having a chamber with a rotatable wheel mounted therein. The gas is mixed with a scrubbing liquid by the rotating wheel which has first and second scrubbing surfaces including vanes for creating turbulence and moving the gas through the chamber. The vanes on the first scrubbing surface increase in height from the axis of the wheel to its periphery to move gas radially outwardly. The vanes on the second scrubbing surface increase in height from the periphery to the axis of the wheel to move the gas radially inwardly.

Abstract: A fluid delivery system (10, 210) is disclosed that includes a pipeline network (20, 220) having a chemical supply line (12, 14, 212), a filtering system (134, 235), a feeding portion (24, 224), and a return portion (26, 226). A first tank (28, 228), a second tank (30, 230), and a third tank (32, 232) are coupled to the feeding portion (24, 224) and the return portion (26, 226) of the pipe network (20, 220). A control module (100) is coupled to a multiplicity of valves (46, 52, 48, 54, 50, 56, 70, 86, 72, 88, 74, 90) for controlling the flow of the fluid through the system in a manner that provides a continuous and bumpless flow of the fluid. Additionally, the system (10, 210) may include a plurality of sensors (94, 96, 98) that allow control module 100 to sense the volume of fluid in the system (10, 210) and each tank (28, 30, 32, 228, 230, 232).