Patents by Inventor Veronica McCarthy

Veronica McCarthy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Synchronization of precursor pulsing and wafer rotation
    Publication number: 20070252299
    Abstract: A method for synchronizing the rotation of a substrate boat with material deposition is disclosed. Whenever support rods of the substrate boat rotate past a deposition source, they will block deposition gas from reaching certain portions of the substrate. By stopping the deposition gas whenever the support rods are located between the substrate and the deposition source, a uniform deposition can be achieved.
    Type: Application
    Filed: April 27, 2006
    Publication date: November 1, 2007
    Inventors: Maitreyee Mahajani, Joseph Yudovsky, Yi-Chiau Huang, Kaushal Singh, Veronica McCarthy