Patents by Inventor Vicky Rashkovan

Vicky Rashkovan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for enhanced voltage contrast analysis
    Patent number: 6900065
    Abstract: An apparatus and a method for electrically testing a semiconductor wafer, the method including: (i) depositing electrical charges at certain points of a test pattern; (ii) scanning at least a portion of the test pattern such as to enhance charge differences resulting from defects; and (iii) collecting charged particles emitted from the at least scanned portion as a result of the scanning, thus providing an indication about an electrical state of the respective test structure.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: May 31, 2005
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Vicky Rashkovan, Dror Shemesh
  • Apparatus and method for enhanced voltage contrast analysis
    Publication number: 20040075458
    Abstract: An apparatus and a method for electrically testing a semiconductor wafer, the method including: (i) depositing electrical charges at certain points of a test pattern; (ii) scanning at least a portion of the test pattern such as to enhance charge differences resulting from defects; and (iii) collecting charged particles emitted from the at least scanned portion as a result of the scanning, thus providing an indication about an electrical state of the respective test structure.
    Type: Application
    Filed: December 19, 2002
    Publication date: April 22, 2004
    Applicant: Applied Materials Israel, Inc.
    Inventors: Vicky Rashkovan, Dror Shemesh