Patents by Inventor Victor A. Yakovlev

Victor A. Yakovlev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for measuring the composition and other properties of thin films utilizing infrared radiation
    Patent number: 6485872
    Abstract: The composition, free carrier concentrations, and other properties of thin films and graded layers embedded in film stack structures are measured by the method of the invention, which is based upon the application of two novel algorithms to extract the composition of a measured layer independently of the confounding effects of additional layers, and which can be effected even when calibration samples are not available with the same layered structure as the samples to be measured. The method uses sample model-based analysis algorithms to extract the dielectric function of the layer to be measured, combined with model-based analysis to relate the composition of the layer to its dielectric function.
    Type: Grant
    Filed: November 22, 2000
    Date of Patent: November 26, 2002
    Assignee: MKS Instruments, Inc.
    Inventors: Peter A. Rosenthal, Sylvie Charpenay, Victor A. Yakovlev