Patents by Inventor Victor Bashurin

Victor Bashurin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Modification of pixelated photolithography masks based on electric fields
    Publication number: 20060225024
    Abstract: Faster synthesis of photolithography mask modifications is described. In one embodiment, the invention includes synthesizing a first binary photolithography mask, developing perturbations to an estimated electric field generated by the first mask in use, and synthesizing a second binary photolithography mask by applying the perturbations to the first mask.
    Type: Application
    Filed: March 31, 2005
    Publication date: October 5, 2006
    Inventors: Bin Hu, Vivek Singh, Victor Bashurin, Yuri Bogunenko