Patents by Inventor Victor Belitsky
Victor Belitsky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7637707Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.Type: GrantFiled: October 24, 2005Date of Patent: December 29, 2009Assignee: Applied Materials, Inc.Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky
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Publication number: 20090308030Abstract: In a first aspect, a method of opening a substrate carrier is provided. The method includes moving the substrate carrier such that a door of the substrate carrier contacts a supporting member; employing the supporting member to support the door; moving a housing of the substrate carrier away from the supporting member; and pivoting the supporting member and door below a bottom surface of the substrate carrier. Numerous other aspects are provided.Type: ApplicationFiled: August 21, 2009Publication date: December 17, 2009Applicant: APPLIED MATERIALS, INC.Inventors: Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt, Victor Belitsky
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Patent number: 7578647Abstract: In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.Type: GrantFiled: February 4, 2005Date of Patent: August 25, 2009Assignee: Applied Materials, Inc.Inventors: Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt, Victor Belitsky
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Publication number: 20060072986Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.Type: ApplicationFiled: October 24, 2005Publication date: April 6, 2006Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky
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Publication number: 20050232734Abstract: In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.Type: ApplicationFiled: February 4, 2005Publication date: October 20, 2005Inventors: Martin Elliott, Michael Rice, Jeffrey Hudgens, Eric Englhardt, Victor Belitsky
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Publication number: 20030202865Abstract: A wafer handler having a central body with a first end and a central axis of rotation is provided. A first end effector, adapted to support a first wafer, is rotatably coupled to the first end of the central body so as to define a first axis of rotation between the central body and the first end effector. Optionally, a second end effector adapted to support a second wafer is rotatably coupled to the second end of the central body so as to define a second axis of rotation between the central body and the second end effector. When the central body is rotated about the central axis of rotation in a first direction over a first angular distance, the first end effector simultaneously rotates about the first axis of rotation and the optional second end effector rotates about the second axis of rotation. Both end effectors are rotated over a second angular distance that is greater than the first angular distance. One or more of the end effectors may be pocketless.Type: ApplicationFiled: April 25, 2002Publication date: October 30, 2003Applicant: Applied Materials, Inc.Inventors: Hari Ponnekanti, Vinay K. Shah, Michael Robert Rice, Victor Belitsky, Damon Cox, Robert B. Lowrance, Joseph Arthur Kraus, Jeffrey C. Hudgens
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Patent number: 6379221Abstract: A method and an apparatus for automatically replacing a used polishing pad in a chemical mechanical polishing system are described. A controller places a mechanical device against the used polishing pad while the pad is on the polishing platen and activates a pad chucking mechanism that affixes the used pad to the mechanical device. The controller then moves the mechanical device and the pad toward a used pad receptacle, where the pad chucking mechanism is deactivated to release the used pad into the receptacle. The controller then places the mechanical device against a clean polishing pad in a clean pad dispenser and reactivates the pad chucking mechanism to affix the clean pad to the mechanical device. The mechanical device and the clean pad are moved toward the platen, where the pad chucking mechanism is deactivated to release the clean polishing pad onto the platen.Type: GrantFiled: December 31, 1996Date of Patent: April 30, 2002Assignee: Applied Materials, Inc.Inventors: Daniel F. Kennedy, Victor Belitsky, Arul Shanmugasundram
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Publication number: 20010043849Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.Type: ApplicationFiled: July 30, 2001Publication date: November 22, 2001Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky
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Patent number: 6283692Abstract: A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.Type: GrantFiled: December 1, 1998Date of Patent: September 4, 2001Assignee: Applied Materials, Inc.Inventors: Ilya Perlov, Evgueni Gantvarg, Victor Belitsky
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Patent number: 6280299Abstract: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.Type: GrantFiled: February 16, 2000Date of Patent: August 28, 2001Assignee: Applied Materials, Inc.Inventors: Daniel Kennedy, Boris Fuksshimov, Victor Belitsky, Boris Fishkin, Kyle Brown, Tom Osterheld, Jeff Beeler, Ginetto Addiego
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Patent number: 6139406Abstract: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.Type: GrantFiled: June 24, 1997Date of Patent: October 31, 2000Assignee: Applied Materials, Inc.Inventors: Daniel Kennedy, Boris Fuksshimov, Victor Belitsky, Boris Fishkin, Kyle Brown, Tom Osterheld, Jeff Beeler, Ginetto Addiego
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Patent number: 6082951Abstract: A pod loading station and method of operation are provided for enabling the transfer and introduction of wafers into a processing system from a wafer pod. The pod loading station generally includes a movable receiving platform for supporting a wafer pod and a movable pod door receiver having a pod door latch actuating mechanism disposed thereon. The movable platform supports a wafer pod, moves the wafer pod into engagement with the pod door receiver, and then retracts to enable the door supported by the door receiver to be removed from the opening of the pod. The pod door receiver then lowers the pod door below the pod to enable access to the pod opening.Type: GrantFiled: January 23, 1998Date of Patent: July 4, 2000Assignee: Applied Materials, Inc.Inventors: Eric A. Nering, Ilya Perlov, Eugene Gantvarg, Victor Belitsky
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Patent number: 5899801Abstract: A chemical mechanical polishing apparatus has a platen with a cavity with an opening to the top surface of the platen. A polishing pad is located at an upper surface of the platen. A flexible membrane is positioned in the cavity to define a first and a second volume. A pressure source is connected to the second volume to flex the membrane, and a lifting member is positioned in the first volume so that flexing of the membrane extends the lifting member through the opening to lift the substrate off the polishing pad. Alternately, de-ionized water may be forced through a passage in the platen and an aperture in the polishing pad to lift the substrate.Type: GrantFiled: October 31, 1996Date of Patent: May 4, 1999Assignee: Applied Materials, Inc.Inventors: Robert D. Tolles, James C. Nystrom, Jeffrey Marks, William Bartlett, Victor Belitsky