Patents by Inventor Victor Flores Iracheta

Victor Flores Iracheta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Volume filling cassette for load lock
    Patent number: 12374521
    Abstract: An ion implantation system including an ion source for generating an ion beam, an end station containing a platen for supporting a substrate to be implanted by the ion beam, and a load lock disposed adjacent the end station and adapted to transfer substrates between an external environment and the end station. The load lock may include a transfer chamber having a hollow interior, a first isolation door affixed to a first side of the transfer chamber and openable to the external environment, a second isolation door affixed to a second side of the transfer chamber and openable to an interior of the end station, and a volume filling cassette disposed within the hollow interior of the transfer chamber and adapted to hold at least one substrate.
    Type: Grant
    Filed: November 4, 2022
    Date of Patent: July 29, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Michael Mason Carrell, Jason M. Schaller, Victor Flores Iracheta
  • VOLUME FILLING CASSETTE FOR LOAD LOCK
    Publication number: 20240153733
    Abstract: An ion implantation system including an ion source for generating an ion beam, an end station containing a platen for supporting a substrate to be implanted by the ion beam, and a load lock disposed adjacent the end station and adapted to transfer substrates between an external environment and the end station. The load lock may include a transfer chamber having a hollow interior, a first isolation door affixed to a first side of the transfer chamber and openable to the external environment, a second isolation door affixed to a second side of the transfer chamber and openable to an interior of the end station, and a volume filling cassette disposed within the hollow interior of the transfer chamber and adapted to hold at least one substrate.
    Type: Application
    Filed: November 4, 2022
    Publication date: May 9, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Michael Mason Carrell, Jason M. Schaller, Victor Flores Iracheta