Patents by Inventor Victor Katsap
Victor Katsap has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11901154Abstract: An electron emission cathode which includes a base, a heater connected to the base, an electron emitter connected to the heater at a mounting location distal to the base, and a conical heat shield surrounding a portion of the heater, having a truncated cone shape comprising a narrow end oriented toward the base and a wide end oriented toward the electron emitter. The conical heat shield is configured to reflect heat radiated by the heater toward the electron emitter. The conical heat shield reduces an overheating required to bring the electron emitter to an emission temperature and reduces a heating power required to operate the cathode.Type: GrantFiled: March 3, 2023Date of Patent: February 13, 2024Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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METHOD AND APPARATUS FOR USABLE BEAM CURRENT AND BRIGHTNESS IN SCHOTTKY THERMAL FIELD EMISSION (TFE)
Publication number: 20230411114Abstract: A system for determining Schottky thermal field emission (TFE) usable current and brightness of a Schottky TFE source is provided, the system including: one or more processors, configured to: acquire and store in a memory a Schottky TFE emission image in a digital format; and determine Schottky TFE usable beam current and brightness for the based on experimentally developed algorithms that utilize usable current criteria and usable emission current density, the usable current criteria being generated based on properties of a central beam component and an outer beam component of Schottky TFE beam current.Type: ApplicationFiled: August 28, 2023Publication date: December 21, 2023Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventors: Victor KATSAP, Chising LAI -
Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE)
Patent number: 11823862Abstract: The present disclosure is related to a Schottky thermal field emission (TFE) source for emitting an electron beam. Exemplary embodiments can provide the acquisition of high-resolution emission images of Schottky TFE source and compute usable beam current and brightness based on experimentally developed usable current criteria. Advantages of these exemplary embodiments include: (1) obtaining usable beam current and brightness of a Schottky TFE source can be important with reference to Schottky TFE development and quality inspection, and (2) optimizing Schottky TFE operation modes so as to maximize Schottky TFE usable beam current and brightness can enable operation of multi-beam electron optical tools.Type: GrantFiled: December 29, 2021Date of Patent: November 21, 2023Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventors: Victor Katsap, Chising Lai -
Publication number: 20230253178Abstract: The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.Type: ApplicationFiled: March 22, 2023Publication date: August 10, 2023Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor KATSAP
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Patent number: 11699564Abstract: A Schottky thermal field emitter (TFE) source integrated with a beam splitter by a standoff, which supports the beam splitter above the Schottky TFE extractor faceplate by a distance of 0.05 mm to 2 mm. The beam splitter includes a microhole array integrated with the standoff and being disposed opposite the extractor faceplate, the microhole array having a plurality of microholes that split the electron beam generated by the Schottky TFE into a plurality of beamlets. The support and extractor may be fabricated from the same material or from different materials. The support may be formed from a high temperature resistive material, which causes a potential difference between the extractor and the microhole array. This potential difference creates positively charged electrostatic lenses at the microholes, which increases current in the individual beamlets. Voltage on the microarray plate may be varied to achieve a high beamlet current.Type: GrantFiled: October 23, 2020Date of Patent: July 11, 2023Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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METHOD AND APPARATUS FOR USABLE BEAM CURRENT AND BRIGHTNESS IN SCHOTTKY THERMAL FIELD EMISSION (TFE)
Publication number: 20230207257Abstract: The present disclosure is related to a Schottky thermal field emission (TFE) source for emitting an electron beam. Exemplary embodiments can provide the acquisition of high-resolution emission images of Schottky TFE source and compute usable beam current and brightness based on experimentally developed usable current criteria. Advantages of these exemplary embodiments include: (1) obtaining usable beam current and brightness of a Schottky TFE source can be important with reference to Schottky TFE development and quality inspection, and (2) optimizing Schottky TFE operation modes so as to maximize Schottky TFE usable beam current and brightness can enable operation of multi-beam electron optical tools.Type: ApplicationFiled: December 29, 2021Publication date: June 29, 2023Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventors: Victor KATSAP, Chising LAI -
Patent number: 11640896Abstract: The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.Type: GrantFiled: May 13, 2021Date of Patent: May 2, 2023Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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Patent number: 11615938Abstract: A thermal field emitter, an apparatus, and a method for generating multiple beams for an e-beam tool are provided. The thermal field emitter includes an electron emitting portion configured to emit an electron beam and a nano-aperture array (NAA) having a plurality of openings. The NAA is positioned in a path of the electron beam. The NAA is configured to form multiple beams. The multiple beams include electrons from the electron beam that pass through the plurality of openings.Type: GrantFiled: December 20, 2019Date of Patent: March 28, 2023Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventors: John Hartley, Victor Katsap
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Patent number: 11562879Abstract: An electrostatic beam transfer lens for a multi-beam apparatus that includes a series of multiple, successive electrodes, such that an aperture bore of each electrode is aligned along an electron gun axis and is configured to allow multiple beams to pass therethrough. The first electrode in the series is a cylindrical electrode configured to receive the multiple beams at an entrance plane. The first electrode has a bore length and a bore diameter such that a ratio of bore diameter/bore length<0.3. The shape of the first electrode defines the electrostatic field penetration to the entrance plane of the first electrode to prevent lens focusing fields of the electrostatic beam transfer lens from extending through the first electrode and beyond the entrance plane, thus providing a uniform, flat electric field at the entrance area of the electrostatic transfer lens.Type: GrantFiled: September 15, 2020Date of Patent: January 24, 2023Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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Publication number: 20220367145Abstract: The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.Type: ApplicationFiled: May 13, 2021Publication date: November 17, 2022Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor KATSAP
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Publication number: 20220130633Abstract: A Schottky thermal field emitter (TFE) source integrated with a beam splitter by a standoff, which supports the beam splitter above the Schottky TFE extractor faceplate by a distance of 0.05 mm to 2 mm. The beam splitter includes a microhole array integrated with the standoff and being disposed opposite the extractor faceplate, the microhole array having a plurality of microholes that split the electron beam generated by the Schottky TFE into a plurality of beamlets. The support and extractor may be fabricated from the same material or from different materials. The support may be formed from a high temperature resistive material, which causes a potential difference between the extractor and the microhole array. This potential difference creates positively charged electrostatic lenses at the microholes, which increases current in the individual beamlets. Voltage on the microarray plate may be varied to achieve a high beamlet current.Type: ApplicationFiled: October 23, 2020Publication date: April 28, 2022Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor KATSAP
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Publication number: 20220084778Abstract: An electrostatic beam transfer lens for a multi-beam apparatus that includes a series of multiple, successive electrodes, such that an aperture bore of each electrode is aligned along an electron gun axis and is configured to allow multiple beams to pass therethrough. The first electrode in the series is a cylindrical electrode configured to receive the multiple beams at an entrance plane. The first electrode has a bore length and a bore diameter such that a ratio of bore diameter/bore length<0.3. The shape of the first electrode defines the electrostatic field penetration to the entrance plane of the first electrode to prevent lens focusing fields of the electrostatic beam transfer lens from extending through the first electrode and beyond the entrance plane, thus providing a uniform, flat electric field at the entrance area of the electrostatic transfer lens.Type: ApplicationFiled: September 15, 2020Publication date: March 17, 2022Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor KATSAP
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Publication number: 20210193428Abstract: A thermal field emitter, an apparatus, and a method for generating multiple beams for an e-beam tool are provided. The thermal field emitter includes an electron emitting portion configured to emit an electron beam and a nano-aperture array (NAA) having a plurality of openings. The NAA is positioned in a path of the electron beam. The NAA is configured to form multiple beams. The multiple beams include electrons from the electron beam that pass through the plurality of openings.Type: ApplicationFiled: December 20, 2019Publication date: June 24, 2021Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventors: John HARTLEY, Victor KATSAP
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Patent number: 10714311Abstract: An individual beam detector for multiple beams includes a thin film in which a passage hole smaller than a pitch between beams of multiple beams and larger than the diameter of a beam is formed and through which the multiple beams can penetrate, a support base to support the thin film in which an opening is formed under the region including the passage hole, and the width size of the opening is formed to have a temperature of the periphery of the passage hole higher than an evaporation temperature of impurities adhering to the periphery in the case that the thin film is irradiated with the multiple beams, and a sensor arranged, at the position away from the thin film by a distance based on which a detection target beam having passed the passage hole can be detected by the sensor as a detection value with contrast discernible.Type: GrantFiled: November 2, 2018Date of Patent: July 14, 2020Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventors: Yoshikuni Goshima, Victor Katsap, Rodney Kendall
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Patent number: 10593505Abstract: Thermionic cathodes and an electron emission apparatus are provided. The thermionic cathodes comprise perovskite material in crystal or sintered form. The thermionic cathodes provide strong electron emission at low operating temperatures.Type: GrantFiled: November 28, 2018Date of Patent: March 17, 2020Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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Patent number: 10573481Abstract: An electron emission apparatus, an electron gun, and a method of fabrication of the electron gun are provided. The electron gun includes a cathode, a Wehnelt, and an anode. The cathode is configured to provide an electron beam. The Wehnelt has a bore. The bore is configured to pass the electron beam. The anode is disposed proximate to the cathode. The diameter of the bore of the Wehnelt and the offset between the Wehnelt and the cathode satisfy a predetermined dimensional relationship. The predetermined dimensional relationship is at least a function of a diameter of the bore of the anode and a distance between the Wehnelt and the anode.Type: GrantFiled: November 28, 2018Date of Patent: February 25, 2020Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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Patent number: 10553388Abstract: A thermionic cathode, an electron emission apparatus, and a method of fabricating the thermionic cathode are provided. The thermionic cathode includes an emitter. The emitter includes a lanthanum hexaboride (LaB6) crystal having a crystallographic orientation of (310). The operating temperature of the thermionic cathode is greater than 1800 K.Type: GrantFiled: November 28, 2018Date of Patent: February 4, 2020Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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Publication number: 20190139739Abstract: An individual beam detector for multiple beams includes a thin film in which a passage hole smaller than a pitch between beams of multiple beams and larger than the diameter of a beam is formed and through which the multiple beams can penetrate, a support base to support the thin film in which an opening is formed under the region including the passage hole, and the width size of the opening is formed to have a temperature of the periphery of the passage hole higher than an evaporation temperature of impurities adhering to the periphery in the case that the thin film is irradiated with the multiple beams, and a sensor arranged, at the position away from the thin film by a distance based on which a detection target beam having passed the passage hole can be detected by the sensor as a detection value with contrast discernible.Type: ApplicationFiled: November 2, 2018Publication date: May 9, 2019Applicants: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventors: Yoshikuni GOSHIMA, Victor KATSAP, Rodney KENDALL
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Patent number: 9790620Abstract: A method to reduce the work function of a carbon-coated lanthanum hexaboride (LaB6) cathode wherein the exposed tip of the cathode is exposed to moisture between two heat treatments is provided. The work function may be reduced by 0.01 eV or more.Type: GrantFiled: January 6, 2017Date of Patent: October 17, 2017Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.Inventor: Victor Katsap
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Patent number: 9165737Abstract: An improved cathode comprises a cone-shaped emitter with a carbon-based coating applied to the emitter cone surface, in which there is a narrow annular gap between the emitter body and the carbon coating. The gap prevents direct contact between the carbon coating and the crystalline emitting material, thereby preventing damaging interactions and extending the useful lifetime of the cathode.Type: GrantFiled: October 4, 2012Date of Patent: October 20, 2015Assignee: NuFlare Technology, Inc.Inventor: Victor Katsap