Patents by Inventor Victor L. Castro

Victor L. Castro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for increased target utilization in ion beam deposition tools
    Patent number: 9478394
    Abstract: In a sputter deposition tool (100) of the type in which an ion source (101) generates a beam directed at a sputtering target, the sputtering target comprises an elongated exterior skirt (102) and a generally circular insert (103) positioned within the skirt, the surfaces of the skirt and insert being relatively coplanar and forming the surface of the target, with the elongated dimension of the skirt being axially oriented toward the ion source. The insert is rotated within the skirt to one of several positions during use of the target by the sputter deposition tool, to distribute wear of the target around the rotating insert and thus increase the utilization and useful life of the overall target assembly.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: October 25, 2016
    Assignee: Veeco Instruments, Inc.
    Inventors: Mario B. Roque, Victor L. Castro, Hector J. Castillo
  • METHOD FOR INCREASED TARGET UTILIZATION IN ION BEAM DEPOSITION TOOLS
    Publication number: 20150262789
    Abstract: In a sputter deposition tool (100) of the type in which an ion source (101) generates a beam directed at a sputtering target, the sputtering target comprises an elongated exterior skirt (102) and a generally circular insert (103) positioned within the skirt, the surfaces of the skirt and insert being relatively coplanar and forming the surface of the target, with the elongated dimension of the skirt being axially oriented toward the ion source. The insert is rotated within the skirt to one of several positions during use of the target by the sputter deposition tool, to distribute wear of the target around the rotating insert and thus increase the utilization and useful life of the overall target assembly.
    Type: Application
    Filed: March 10, 2015
    Publication date: September 17, 2015
    Applicant: VEECO INSTRUMENTS, INC.
    Inventors: Mario B. Roque, Victor L. Castro