Patents by Inventor Victor M. Beneviste

Victor M. Beneviste has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion source
    Patent number: 7435971
    Abstract: An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A temperature sensor monitors temperatures within the arc chamber and provides a signal related to sensed temperature. A controller monitors sensed temperature as measured by the sensor and adjusts the temperature to maintain the sensed temperature within a range.
    Type: Grant
    Filed: May 19, 2006
    Date of Patent: October 14, 2008
    Assignee: Axcelis Technologies, Inc.
    Inventors: Bo H. Vanderberg, Victor M. Beneviste, John F. Fallon, Ilya Pokidov
  • Ion source
    Publication number: 20080067412
    Abstract: An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A temperature sensor monitors temperatures within the arc chamber and provides a signal related to sensed temperature. A controller monitors sensed temperature as measured by the sensor and adjusts the temperature to maintain the sensed temperature within a range.
    Type: Application
    Filed: May 19, 2006
    Publication date: March 20, 2008
    Inventors: Bo H. Vanderberg, Victor M. Beneviste, John F. Fallon, IIya Pokidov