Abstract: Disclosed are silica structure crack detection methods and apparatuses particularly useful in sol-gel fabrication processes. A wave signature of a crack in the silica structure is sensed to indicate that cracking has occurred. Sensing may be by active or passive techniques and may include contact and non-contact methods of monitoring. Further disclosed is a silica structure fabrication process development method wherein cracks are monitored by sensing a wave signature of a crack to isolate a process step or steps in which cracking has occurred. Process parameters are then adjusted in the isolated step to diminish or eliminate cracking.

Abstract: A crack detection method and system capable of detecting cracks on a scale of about 5 &mgr;m or greater, useful for detecting cracks in sol-gel tubes. An electromagnetic radiation signal is transmitted from a sensor to a body in which cracking may occur. The signal is reflected back to and received by the sensor. An output voltage from the sensor is measured which is proportional to a signal characteristic change between the transmitted and received signals. Signal characteristics such as frequency, phase, and amplitude may be monitored. The signal characteristic change may result from one or more mechanisms selected from the group consisting of microscopic motion of the body, media transition and fluid movement.

Abstract: Disclosed are silica structure crack detection methods and apparatuses particularly useful in sol-gel fabrication processes. A wave signature of a crack in the silica structure is sensed to indicate that cracking has occurred. Sensing may be by active or passive techniques and may include contact and non-contact methods of monitoring.

Abstract: A crack detection method capable of detecting cracks on a scale of about 5 &mgr;m or greater, useful for detecting cracks in sol-gel tubes. A signal is transmitted from a source to a body in which cracking may occur. The signal is reflected back to a sensor. An output voltage from the sensor is measured which is proportional to a signal characteristic change between the transmitted and received signals. Signal characteristics such as frequency, phase, and amplitude may be monitored. The signal characteristic change may result from one or more mechanisms selected from the group consisting of microscopic motion of the body, media transition and fluid movement.

Abstract: A micromechanical variable/tunable inductor is disclosed. The present inductor comprises at least two elements capable of supporting spatial electromagnetic coupling and means for varying a geometrical relationship thereof. Varying the geometrical relationship between such elements varies the inductance of the inductor. In some embodiments, the geometrical relationship that is varied is the spacing between the two elements. The spacing is varied by creating a differential movement between such elements. In further embodiments, the present invention comprises resonant circuits incorporating such variable inductors, and oscillators including such resonant circuits.

Abstract: A device for tuning a circuit includes a substrate, a transmission line on the substrate that includes first and second conductors coupled to a circuit to be tuned, and a movable short-circuit for varying the impedance the transmission line presents to the circuit to be tuned. The movable short-circuit includes a dielectric layer disposed atop the transmission line and a distributed shorting element in the form of a conductive member that is configured to be slid along at least a portion of the transmission line atop the dielectric layer. The conductive member is configured to span the first and second conductors of the transmission line and to define at least a first opening that spans the two conductors so that the conductive member includes first and second sections separated by the first opening.