Patents by Inventor Victoria L. Eckert

Victoria L. Eckert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultrathin chemically grown oxide film as a dopant diffusion barrier in semiconductor devices
    Patent number: 7265049
    Abstract: The invention is a chemically grown oxide layer which prevents dopant diffusion between semiconductor layers. The chemically grown oxide layer may be so thin that it does not form a barrier to electrical conduction, and thus may be formed within active devices such as diodes or bipolar transistors. Such a chemically grown oxide film is advantageously used to prevent dopant diffusion in a vertically oriented polysilicon diode formed in a monolithic three dimensional memory array.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: September 4, 2007
    Assignee: SanDisk 3D LLC
    Inventors: S. Brad Herner, Victoria L. Eckert