Patents by Inventor Vidi Saptari

Vidi Saptari has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230031118
    Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
    Type: Application
    Filed: January 11, 2021
    Publication date: February 2, 2023
    Inventors: Jim Ye, Vidi Saptari, Junhua Ding
  • Patent number: 11513108
    Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: November 29, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Jim Ye, Vidi Saptari, Junhua Ding
  • Publication number: 20210215655
    Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
    Type: Application
    Filed: January 14, 2020
    Publication date: July 15, 2021
    Inventors: Jim Ye, Vidi Saptari, Junhua Ding
  • Patent number: 9958380
    Abstract: The disclosure relates to spectroscopic systems and spectrometers configured for hydrocarbon gas composition monitoring which provides compound speciation capability and function. In certain embodiments, the system identifies two or more bands of spectral data—e.g., including a band in each of (i) the near infrared and (ii) mid infrared wavelength regions, though bands covering subsets from about 800 nm to about 12 ?m can be used—from the signal corresponding to the hydrocarbon fluid in the gas flow cell, where the two or more bands are not contiguous (e.g., there is at least a 50 nm separation between the nearest ends of two bands). A combined spectrum is then formed from the two or more non-contiguous bands of spectral data and processed to identify and/or quantify the constituents of the hydrocarbon fluid.
    Type: Grant
    Filed: June 29, 2015
    Date of Patent: May 1, 2018
    Assignees: MKS Instruments, Inc., Pason Systems Corp.
    Inventor: Vidi Saptari
  • Patent number: 9739708
    Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: August 22, 2017
    Assignees: MKS Instruments, Inc., Pason Systems Corp.
    Inventor: Vidi A. Saptari
  • Patent number: 9651422
    Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: May 16, 2017
    Assignee: MKS Instruments, Inc.
    Inventor: Vidi A. Saptari
  • Publication number: 20170030829
    Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.
    Type: Application
    Filed: October 11, 2016
    Publication date: February 2, 2017
    Inventor: Vidi A. Saptari
  • Patent number: 9488570
    Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.
    Type: Grant
    Filed: October 10, 2014
    Date of Patent: November 8, 2016
    Assignees: Pason Systems Corp., MKS Instruments, Inc.
    Inventor: Vidi A. Saptari
  • Patent number: 9372152
    Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.
    Type: Grant
    Filed: March 3, 2015
    Date of Patent: June 21, 2016
    Assignee: MKS Instruments, Inc.
    Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
  • Patent number: 9250132
    Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.
    Type: Grant
    Filed: July 1, 2013
    Date of Patent: February 2, 2016
    Assignee: Pason Systems Corp.
    Inventors: David Bonyuet, Vidi A. Saptari
  • Publication number: 20150377774
    Abstract: The disclosure relates to spectroscopic systems and spectrometers configured for hydrocarbon gas composition monitoring which provides compound speciation capability and function. In certain embodiments, the system identifies two or more bands of spectral data—e.g., including a band in each of (i) the near infrared and (ii) mid infrared wavelength regions, though bands covering subsets from about 800 nm to about 12 ?m can be used—from the signal corresponding to the hydrocarbon fluid in the gas flow cell, where the two or more bands are not contiguous (e.g., there is at least a 50 nm separation between the nearest ends of two bands). A combined spectrum is then formed from the two or more non-contiguous bands of spectral data and processed to identify and/or quantify the constituents of the hydrocarbon fluid.
    Type: Application
    Filed: June 29, 2015
    Publication date: December 31, 2015
    Inventor: Vidi Saptari
  • Publication number: 20150355081
    Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.
    Type: Application
    Filed: March 3, 2015
    Publication date: December 10, 2015
    Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
  • Publication number: 20150131093
    Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.
    Type: Application
    Filed: October 10, 2014
    Publication date: May 14, 2015
    Inventor: Vidi A. Saptari
  • Publication number: 20150103354
    Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.
    Type: Application
    Filed: October 20, 2014
    Publication date: April 16, 2015
    Inventor: Vidi A. Saptari
  • Patent number: 9001335
    Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.
    Type: Grant
    Filed: January 17, 2013
    Date of Patent: April 7, 2015
    Assignee: MKS Instruments Inc.
    Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
  • Patent number: 8896839
    Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: November 25, 2014
    Assignee: Pason Systems Corp.
    Inventor: Vidi A. Saptari
  • Publication number: 20130293893
    Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.
    Type: Application
    Filed: July 1, 2013
    Publication date: November 7, 2013
    Inventors: David Bonyuet, Vidi A. Saptari
  • Patent number: 8502981
    Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: August 6, 2013
    Assignee: Pason Systems Corp.
    Inventors: David Bonyuet, Vidi A. Saptari
  • Patent number: 8462347
    Abstract: A method for monitoring of siloxane compounds in a biogas includes the step of generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method also includes the step of calculating a concentration of at least one siloxane compound in the biogas using a second absorption spectrum based on, at least, a first individual absorption spectrum for a known concentration of the at least one siloxane compound.
    Type: Grant
    Filed: March 9, 2010
    Date of Patent: June 11, 2013
    Assignee: MKS Instruments, Inc.
    Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
  • Publication number: 20120200855
    Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.
    Type: Application
    Filed: April 20, 2012
    Publication date: August 9, 2012
    Applicant: Pason Systems Corp.
    Inventors: David Bonyuet, Vidi A. Saptari