Patents by Inventor Vidi Saptari
Vidi Saptari has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230031118Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.Type: ApplicationFiled: January 11, 2021Publication date: February 2, 2023Inventors: Jim Ye, Vidi Saptari, Junhua Ding
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Patent number: 11513108Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.Type: GrantFiled: January 14, 2020Date of Patent: November 29, 2022Assignee: MKS Instruments, Inc.Inventors: Jim Ye, Vidi Saptari, Junhua Ding
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Publication number: 20210215655Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.Type: ApplicationFiled: January 14, 2020Publication date: July 15, 2021Inventors: Jim Ye, Vidi Saptari, Junhua Ding
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Patent number: 9958380Abstract: The disclosure relates to spectroscopic systems and spectrometers configured for hydrocarbon gas composition monitoring which provides compound speciation capability and function. In certain embodiments, the system identifies two or more bands of spectral data—e.g., including a band in each of (i) the near infrared and (ii) mid infrared wavelength regions, though bands covering subsets from about 800 nm to about 12 ?m can be used—from the signal corresponding to the hydrocarbon fluid in the gas flow cell, where the two or more bands are not contiguous (e.g., there is at least a 50 nm separation between the nearest ends of two bands). A combined spectrum is then formed from the two or more non-contiguous bands of spectral data and processed to identify and/or quantify the constituents of the hydrocarbon fluid.Type: GrantFiled: June 29, 2015Date of Patent: May 1, 2018Assignees: MKS Instruments, Inc., Pason Systems Corp.Inventor: Vidi Saptari
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Patent number: 9739708Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.Type: GrantFiled: October 11, 2016Date of Patent: August 22, 2017Assignees: MKS Instruments, Inc., Pason Systems Corp.Inventor: Vidi A. Saptari
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Patent number: 9651422Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.Type: GrantFiled: October 20, 2014Date of Patent: May 16, 2017Assignee: MKS Instruments, Inc.Inventor: Vidi A. Saptari
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Publication number: 20170030829Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.Type: ApplicationFiled: October 11, 2016Publication date: February 2, 2017Inventor: Vidi A. Saptari
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Patent number: 9488570Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.Type: GrantFiled: October 10, 2014Date of Patent: November 8, 2016Assignees: Pason Systems Corp., MKS Instruments, Inc.Inventor: Vidi A. Saptari
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Patent number: 9372152Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.Type: GrantFiled: March 3, 2015Date of Patent: June 21, 2016Assignee: MKS Instruments, Inc.Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
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Patent number: 9250132Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.Type: GrantFiled: July 1, 2013Date of Patent: February 2, 2016Assignee: Pason Systems Corp.Inventors: David Bonyuet, Vidi A. Saptari
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Publication number: 20150377774Abstract: The disclosure relates to spectroscopic systems and spectrometers configured for hydrocarbon gas composition monitoring which provides compound speciation capability and function. In certain embodiments, the system identifies two or more bands of spectral data—e.g., including a band in each of (i) the near infrared and (ii) mid infrared wavelength regions, though bands covering subsets from about 800 nm to about 12 ?m can be used—from the signal corresponding to the hydrocarbon fluid in the gas flow cell, where the two or more bands are not contiguous (e.g., there is at least a 50 nm separation between the nearest ends of two bands). A combined spectrum is then formed from the two or more non-contiguous bands of spectral data and processed to identify and/or quantify the constituents of the hydrocarbon fluid.Type: ApplicationFiled: June 29, 2015Publication date: December 31, 2015Inventor: Vidi Saptari
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Publication number: 20150355081Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.Type: ApplicationFiled: March 3, 2015Publication date: December 10, 2015Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
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Publication number: 20150131093Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.Type: ApplicationFiled: October 10, 2014Publication date: May 14, 2015Inventor: Vidi A. Saptari
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Publication number: 20150103354Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.Type: ApplicationFiled: October 20, 2014Publication date: April 16, 2015Inventor: Vidi A. Saptari
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Patent number: 9001335Abstract: A method is provided for monitoring one or more silicon-containing compounds present in a biogas. The method includes generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method includes generating at least one surrogate absorption spectrum based on, at least, individual absorption spectrum for each of a subset of one or more silicon-containing compounds selected from a larger set of known silicon-containing compounds with known concentrations. A total concentration of the one or more silicon-containing compounds in the biogas can be calculated based on the first absorption spectrum and the at least one surrogate absorption spectrum.Type: GrantFiled: January 17, 2013Date of Patent: April 7, 2015Assignee: MKS Instruments Inc.Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
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Patent number: 8896839Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.Type: GrantFiled: April 7, 2010Date of Patent: November 25, 2014Assignee: Pason Systems Corp.Inventor: Vidi A. Saptari
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Publication number: 20130293893Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.Type: ApplicationFiled: July 1, 2013Publication date: November 7, 2013Inventors: David Bonyuet, Vidi A. Saptari
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Patent number: 8502981Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.Type: GrantFiled: April 20, 2012Date of Patent: August 6, 2013Assignee: Pason Systems Corp.Inventors: David Bonyuet, Vidi A. Saptari
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Patent number: 8462347Abstract: A method for monitoring of siloxane compounds in a biogas includes the step of generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method also includes the step of calculating a concentration of at least one siloxane compound in the biogas using a second absorption spectrum based on, at least, a first individual absorption spectrum for a known concentration of the at least one siloxane compound.Type: GrantFiled: March 9, 2010Date of Patent: June 11, 2013Assignee: MKS Instruments, Inc.Inventors: Charles Mark Phillips, Barbara Marshik-Geurts, Leonard I. Kamlet, Martin L. Spartz, Vidi Saptari
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Publication number: 20120200855Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly.Type: ApplicationFiled: April 20, 2012Publication date: August 9, 2012Applicant: Pason Systems Corp.Inventors: David Bonyuet, Vidi A. Saptari