Patents by Inventor Vijay-Anandh Shanmugam

Vijay-Anandh Shanmugam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing silica micro-structures from x-ray lithography of SOG materials
    Patent number: 6713408
    Abstract: A lithographic method for producing high aspect ratio silica micro-structures having the steps of: providing a carrier substrate with a confinement boundary placed on the carrier substrate; placing the SOG material within the confinement boundary and soft baking at a temperature above its glass transition temperature; forming a pattern of interest on the soft baked SOG material by x-ray lithography; and heating the SOG material until it is substantially converted to a silica-like oxide.
    Type: Grant
    Filed: December 14, 2001
    Date of Patent: March 30, 2004
    Assignee: Louisiana Tech University Foundation, Inc.
    Inventors: Vijay-Anandh Shanmugam, Michael J. Vasile, Philip J. Coane