Patents by Inventor Vijay Sarihan

Vijay Sarihan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micromachined flow sensor device using a pressure difference and method of manufacturing the same
    Patent number: 5515735
    Abstract: A flow sensor device including a body portion that provides a pressure differential when placed in fluid stream and a pressure sensor portion associated with the body portion to sense the pressure differential. In one embodiment, the body portion (13,72,113) includes a channel (16,76,116) that extends from an entrance side (24,44,124) to an exit side (26, 46). The channel (16, 76,116) has an inner portion (27, 47,87) between the entrance side (24, 44,124) and the exit side (26, 46). The channel (16,76,116) has a first cross-sectional area at the entrance side (24,44,124) and a second cross-sectional area at the inner portion (27,47,87), which is less than the first cross-sectional area. The pressure sensor portion (14,74,114) includes a diaphragm (18,38,78,118) and is associated with the body portion (13,72,113) such that when a fluid passes through the channel (16, 76,116), a pressure differential is sensed by the pressure sensor portion (14,74,114).
    Type: Grant
    Filed: January 3, 1995
    Date of Patent: May 14, 1996
    Assignee: Motorola, Inc.
    Inventor: Vijay Sarihan