Patents by Inventor Vijayabaskar Soundarrajan

Vijayabaskar Soundarrajan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods
    Patent number: 10159169
    Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.
    Type: Grant
    Filed: October 27, 2016
    Date of Patent: December 18, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Vincent, Michael Kuchar, Dean C. Hruzek, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt, Robert M. McAndrew
  • FLEXIBLE EQUIPMENT FRONT END MODULE INTERFACES, ENVIRONMENTALLY-CONTROLLED EQUIPMENT FRONT END MODULES, AND ASSEMBLY METHODS
    Publication number: 20180124960
    Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.
    Type: Application
    Filed: October 27, 2016
    Publication date: May 3, 2018
    Inventors: Joseph Vincent, Michael Kuchar, Dean C. Hruzek, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt, Robert M. McAndrew