Patents by Inventor Vijayakomar Ramachandrarao

Vijayakomar Ramachandrarao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a dual-damascene structure
    Publication number: 20060105567
    Abstract: A dual-damascene structure is formed in a porous dielectric material using an anti-reflective coating. In accordance with one embodiment, during patterning and etching if the trench portions of the dual-damascene structure, the anti-reflective coating has a first density. After patterning and etching, the anti-reflective coating density is reduced. The reduction in the anti-reflective coating's density facilitates selective removal of the anti-reflective coating relative to the porous dielectric material.
    Type: Application
    Filed: November 12, 2004
    Publication date: May 18, 2006
    Inventors: Vijayakomar Ramachandrarao, Kevin O'Brien