Patents by Inventor Viken Tavitian

Viken Tavitian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing by a combination of photolytic, pyrolytic and catalytic processes
    Patent number: 4843030
    Abstract: A semiconductor processing method is provided for growing a semiconductor film from a semiconductorbearing gas on a substrate at a substrate temperature below the pyrolytic threshold of the gas. The gas is photodissociated to a collisionally stable species which migrates and travels in the gas phase the entire distance to the substrate, surving hundreds of collisions, and is pyrolyzed at the surface of the substrate and forms several monolayers of semiconductor material which is substantially more catalytically active than the substrate and which subsequently catalyzes decomposition of the gas.
    Type: Grant
    Filed: November 30, 1987
    Date of Patent: June 27, 1989
    Assignee: Eaton Corporation
    Inventors: J. Gary Eden, Kevin K. King, Viken Tavitian