Patents by Inventor Vikki S. Simpson

Vikki S. Simpson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor wafer edge polishing system and method
    Patent number: 5595522
    Abstract: An edge polishing system (20, 320) and method for edge polishing semiconductor wafers is disclosed. The system (20, 320) includes a loader (22, 326), a polisher (24, 328), an unloader (26, 330), and a controller (28, 335). The method includes the steps of loading wafers (28), and spacers (30) into a loader (22) to form a stack (36), moving the stack (36) into a polisher (24) and causing polisher (24) to polish the stack (36), then moving the stack (36) to an unloader (26), which semiautomatically removes the wafers (28) and spacers (30). The system (20) may include a controller (28) for entering the appropriate commands.
    Type: Grant
    Filed: January 4, 1994
    Date of Patent: January 21, 1997
    Assignee: Texas Instruments Incorporated
    Inventors: Vikki S. Simpson, Tom G. Gullett, Jerry B. Medders, Arthur R. Clark, Bobby R. Robbins, Danny R. Newton, Lawrence D. Dyer, Douglas W. Bilderback, Clyde A. King
  • Method of surface protection of a semiconductor wafer during polishing
    Patent number: 5424224
    Abstract: The protection to the backside of the semiconductor wafer is accomplished by applying a layer of silicon oxide or silicon nitride or other deposited material to the back surface of a semiconductor wafer to protect against particles, scratches, and etching by mild caustic solutions. The layer remains in place during all three processes, edge pre-polish, mirror edge polish, and wafer polish.
    Type: Grant
    Filed: January 19, 1993
    Date of Patent: June 13, 1995
    Assignee: Texas Instruments Incorporated
    Inventors: Franklin L. Allen, Eugene C. Davis, Lawrence D. Dyer, Jerry B. Medders, Vikki S. Simpson, Jerry D. Smith, Michael Cunningham, John B. Robbins