Patents by Inventor Vikki Sue Simpson

Vikki Sue Simpson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for maintaining the buffer capacity of siliceous chemical-mechanical silicon polishing slurries
    Patent number: 6028006
    Abstract: A method for maintaining the buffer capacity of a polishing slurry during chemical-mechanical wafer polishing, the method comprising circulating the polishing slurry in a chemical-mechanical wafer polishing apparatus, monitoring the pH of the polishing slurry, combining an agent into the polishing slurry to adjust the pH of the polishing slurry and maintaining the pH of the polishing slurry within a predetermined range, thereby maintaining the buffer capacity of the polishing slurry.
    Type: Grant
    Filed: August 1, 1997
    Date of Patent: February 22, 2000
    Assignee: Texas Instruments Incorporated
    Inventors: Mohendra S. Bawa, Vikki Sue Simpson, Palmer A. Miller, Franklin Louis Allen, Gary Lee Etheridge, Kenneth John L'Anglois, Michael H. Grimes