Patents by Inventor Vikram Atul Thakar

Vikram Atul Thakar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a temperature-compensated micromechanical resonator
    Patent number: 9742373
    Abstract: A method of making a temperature-compensated resonator is presented. The method comprises the steps of: (a) providing a substrate including a device layer; (b) replacing material from the device layer with material having an opposite temperature coefficient of elasticity (TCE) along a pre-determined region of high strain energy density for the resonator; (c) depositing a capping layer over the replacement material; and (d) etch-releasing the resonator from the substrate. The resonator may be a part of a micro electromechanical system (MEMS).
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: August 22, 2017
    Assignee: The Regents of the University of Michigan
    Inventors: Mina Raieszadeh, Zhengzheng Wu, Vikram Atul Thakar, Adam Peczalski