Patents by Inventor Vikram Doshi

Vikram Doshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Birdsbeak encroachment using combination of wet and dry etch for isolation nitride
    Patent number: 6066545
    Abstract: A technique for reducing active area encroachment (birdsbeak) by using a polysilicon hard mask combined with both wet and dry etch for the isolation nitride. This process forms a thinner layer of nitride adjacent the openings for oxide growth, which reduces stress at the silicon/nitride interface. The advantages include control over birdsbeak, reliable gate oxide quality, low junction leakage current, an improved active area, improved isolation, low peripheral junction leakage, and higher field transistor threshold voltage.
    Type: Grant
    Filed: December 7, 1998
    Date of Patent: May 23, 2000
    Assignee: Texas Instruments Incorporated
    Inventors: Vikram Doshi, Hiroshi Ono, Takayuki Niuya, Hayato Deguchi