Patents by Inventor Viktor Granson
Viktor Granson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12736435Abstract: A device for measuring caustic parameters of a laser beam includes a beam splitter for splitting the laser beam into at least three spatially separated partial beams, and a detection unit for detecting images of the partial beams. A beam path from an input of the device to the beam splitter defines a beam axis for the laser beam, along which the laser beam propagates until entering the beam splitter. The beam splitter includes an optical lens, and a partially reflective surface configured to split the laser beam into the at least three partial beams by partial reflection within the optical lens. The optical lens is positioned off-axis such that an optical axis of the optical lens extends off-axis to the beam axis, and/or the optical lens is tilted such that the optical axis of the optical lens forms an angle with the beam axis that deviates from 0°.Type: GrantFiled: August 19, 2024Date of Patent: September 15, 2026Assignee: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SEInventors: Steffen Erhard, Viktor Granson, Clemens Kieninger, Andreas Herdt, Vincent Hahn
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Publication number: 20260049895Abstract: A device for measuring caustic parameters of a laser beam includes a beam splitter for splitting the laser beam into at least three spatially separated partial beams, and a detection unit for detecting images of the partial beams. A beam path from an input of the device to the beam splitter defines a beam axis for the laser beam, along which the laser beam propagates until entering the beam splitter. The beam splitter includes an optical lens, and a partially reflective surface configured to split the laser beam into the at least three partial beams by partial reflection within the optical lens. The optical lens is positioned off-axis such that an optical axis of the optical lens extends off-axis to the beam axis, and/or the optical lens is tilted such that the optical axis of the optical lens forms an angle with the beam axis that deviates from 0°.Type: ApplicationFiled: August 19, 2024Publication date: February 19, 2026Inventors: Steffen Erhard, Viktor Granson, Clemens Kieninger, Andreas Herdt, Vincent Hahn
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Patent number: 11243114Abstract: The invention relates to a method for determining at least one beam propagation parameter (M2, w0, ?, z0) of a laser beam, comprising: directing the laser beam through a lens arrangement towards a spatially resolving detector, imaging the laser beam at a plurality of different focus positions (F1, . . . ) relative to the spatially resolving detector by adjusting a focal length (f1, . . . ) of the lens arrangement, and determining the at least one beam propagation parameter (M2, w0, ?, z0) by evaluating an intensity distribution (l(x,y)) of the laser beam on the spatially resolving detector at the plurality of different focus positions (F1, . . . ). The method comprises adjusting the focal length (f1, . . . ) of the lens arrangement by arranging lens elements (A1, . . . ; B1, . . . ) having different focal lengths (fA1, . . . ; fB1, . . . ) in a beam path of the laser beam.Type: GrantFiled: September 17, 2018Date of Patent: February 8, 2022Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventors: Viktor Granson, Jonathan Mueller, Dirk Sodtke
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Publication number: 20200088570Abstract: The invention relates to a method for determining at least one beam propagation parameter (M2, w0, ?, Z0) of a laser beam, comprising: directing the laser beam through a lens arrangement towards a spatially resolving detector, imaging the laser beam at a plurality of different focus positions (F1, . . . ) relative to the spatially resolving detector by adjusting a focal length (f1, . . . ) of the lens arrangement, and determining the at least one beam propagation parameter (M2, w0, ?, Z0) by evaluating an intensity distribution (l(x,y)) of the laser beam on the spatially resolving detector at the plurality of different focus positions (F1, . . . ). The method comprises adjusting the focal length (f1, . . . ) of the lens arrangement by arranging lens elements (A1, . . . ; B1, . . . ) having different focal lengths (fA1, . . . ; fB1, . . . ) in a beam path of the laser beam.Type: ApplicationFiled: September 17, 2018Publication date: March 19, 2020Inventors: Viktor Granson, Jonathan Mueller, Dirk Sodtke
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Patent number: 9071031Abstract: A radio frequency (RF) excited laser assembly includes a pair of opposed electrodes defining an inter-electrode gap and a conductive termination bridge in electrical contact with both electrodes. The termination bridge mechanically supports and positions the electrodes relative to each other and provides a termination impedance for an RF voltage applied to the electrodes. A conical spiral inductor includes one or more metals windings, and one or more concentric terminals, such that the conical spiral inductor defines an inter-winding spacing sufficient to mitigate ionization of a gas medium between windings. A radio frequency (RF) feed-through assembly configured to apply an RF voltage to a pair of opposing electrodes such that a conductor is isolated from a metal sleeve position around the conductor by ion sheath discharge barrier.Type: GrantFiled: October 31, 2011Date of Patent: June 30, 2015Assignee: Trumpf, Inc.Inventors: Francisco Javier Villarreal-Saucedo, Jesus Fernando Monjardin-Lopez, Peter Daniel, Jochen Deile, Shadi Sumrain, Viktor Granson
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Publication number: 20120106586Abstract: A radio frequency (RF) excited laser assembly includes a pair of opposed electrodes defining an inter-electrode gap and a conductive termination bridge in electrical contact with both electrodes. The termination bridge mechanically supports and positions the electrodes relative to each other and provides a termination impedance for an RF voltage applied to the electrodes. A conical spiral inductor includes one or more metals windings, and one or more concentric terminals, such that the conical spiral inductor defines an inter-winding spacing sufficient to mitigate ionization of a gas medium between windings. A radio frequency (RF) feed-through assembly configured to apply an RF voltage to a pair of opposing electrodes such that a conductor is isolated from a metal sleeve position around the conductor by ion sheath discharge barrier.Type: ApplicationFiled: October 31, 2011Publication date: May 3, 2012Applicant: TRUMPF, INC.Inventors: Francisco Javier Villarreal-Saucedo, Jesus Fernando Monjardin-Lopez, Peter Daniel, Jochen Deile, Shadi Sumrain, Viktor Granson
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Patent number: 7778303Abstract: An RF excited laser assembly includes a pair of opposed electrodes, and at least one inductor. The pair of opposed electrodes defines an inter-electrode gap that provides a discharge volume for laser propagation within a gas medium. The pair of opposed electrodes define one or more discharge-free regions within a laser-free region in the inter-electrode gap. The least one inductor is electrically connected to both electrodes and extends between the electrodes within the inter-electrode gap and inside of the one or more discharge-free regions within the laser-free region.Type: GrantFiled: November 5, 2007Date of Patent: August 17, 2010Assignee: Trumpf, Inc.Inventors: Francisco J. Villarreal-Saucedo, Jochen Deile, Shadi Sumrain, Viktor Granson, Peter Daniel
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Publication number: 20090116531Abstract: An RF excited laser assembly includes a pair of opposed electrodes, and at least one inductor. The pair of opposed electrodes defines an inter-electrode gap that provides a discharge volume for laser propagation within a gas medium. The pair of opposed electrodes define one or more discharge-free regions within a laser-free region in the inter-electrode gap. The least one inductor is electrically connected to both electrodes and extends between the electrodes within the inter-electrode gap and inside of the one or more discharge-free regions within the laser-free region.Type: ApplicationFiled: November 5, 2007Publication date: May 7, 2009Applicant: TRUMPF INC.Inventors: Francisco J. Villarreal-Saucedo, Jochen Deile, Shadi Sumrain, Viktor Granson, Peter Daniel