Abstract: A method for manufacturing a piezoelectric resonator. The method includes: depositing a piezoelectric layer and forming a recess in a lateral area in such a way that a silicon functional layer is exposed inside the recess, forming a silicide layer on a surface of the silicon functional layer exposed inside the recess, forming a diffusion barrier layer on the silicide layer, depositing and structuring a first and second metallization layer in such a way that a supply line and two connection elements are formed, forming the oscillating structure by structuring the silicon functional layer, the silicon functional layer of the oscillating structure being able to be electrically contacted via the first connection element and forming a lower electrode of the resonator, the first metallization layer of the oscillating structure being able to be electrically contacted via the second connection element and forming an upper electrode of the resonator.

Abstract: A method for manufacturing a piezoelectric resonator. The method includes: depositing a piezoelectric layer and forming a recess in a lateral area in such a way that a silicon functional layer is exposed inside the recess, forming a silicide layer on a surface of the silicon functional layer exposed inside the recess, forming a diffusion barrier layer on the silicide layer, depositing and structuring a first and second metallization layer in such a way that a supply line and two connection elements are formed, forming the oscillating structure by structuring the silicon functional layer, the silicon functional layer of the oscillating structure being able to be electrically contacted via the first connection element and forming a lower electrode of the resonator, the first metallization layer of the oscillating structure being able to be electrically contacted via the second connection element and forming an upper electrode of the resonator.

Abstract: An apparatus is provided for identifying a property value of a fluid which is to be measured, a method for operating such an apparatus, and a method for manufacturing such an apparatus. The apparatus encompasses: a measurement capacitor device bringable into contact with the fluid, the measurement capacitor device having a first electrode, a second electrode, a first dielectric layer, and a second dielectric layer; a first dielectric constant of the first dielectric layer being dependent, in a context of contact with the fluid, on the property of the fluid to be measured; a second dielectric constant of the second dielectric layer being substantially independent of the property of the fluid which is to be measured; a compensation capacitor device that has the second dielectric layer, a third electrode, and a fourth electrode; the compensation capacitor device connected in parallel, or connectable in parallel, with the measurement capacitor device.

Abstract: An electronic module includes at least one support plate and at least one electronic component. The at least one support plate defines at least one through opening and has a contact side that includes at least one contact element. The at least one electronic module includes at least one electronic component positioned on the contact side of the support plate opposite the through opening. The at least one contact element projects beyond the at least one electronic component.

Abstract: An apparatus is provided for identifying a property value of a fluid which is to be measured, a method for operating such an apparatus, and a method for manufacturing such an apparatus. The apparatus encompasses: a measurement capacitor device bringable into contact with the fluid, the measurement capacitor device having a first electrode, a second electrode, a first dielectric layer, and a second dielectric layer; a first dielectric constant of the first dielectric layer being dependent, in a context of contact with the fluid, on the property of the fluid to be measured; a second dielectric constant of the second dielectric layer being substantially independent of the property of the fluid which is to be measured; a compensation capacitor device that has the second dielectric layer, a third electrode, and a fourth electrode; the compensation capacitor device connected in parallel, or connectable in parallel, with the measurement capacitor device.