Abstract: A method of control of chemico-thermal treatment of workpieces in a glow discharge comprising the steps of measuring the workpiece temperature, its rate of change and frequency of arc occurrence, comparing the measured quantities with their predetermined values, producing the corresponding error signals, and obtaining a control signal from the latter to control the glow discharge voltage.A device for carrying out the method of the invention comprising a temperature sensor, a rate-of-change-of-temperature sensor, and an arc occurrence frequency sensor having their outputs connected to comparison elements adapted to compare said measured quantities with their predetermined values, and having their inputs connected to the workpieces and to leads of a discharge chamber. The comparison elements have their outputs coupled to the inputs of regulators of the temperature, its rate of change and frequency of arc occurrence, said regulators being coupled to a supply voltage source via a control unit.