Patents by Inventor Vinayak V. Vats

Vinayak V. Vats has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF RUTHENIUM
    Publication number: 20120216712
    Abstract: Composition and method for depositing ruthenium. A composition containing ruthenium tetroxide RuO4 is used as a precursor solution 608 to coat substrates 400 via ALD, plasma enhanced deposition, and/or CVD. Periodic plasma densification may be used.
    Type: Application
    Filed: January 19, 2010
    Publication date: August 30, 2012
    Inventors: Ajit Paranjpe, Vinayak V. Vats, Randhir Bubber