Abstract: A ventilated cabinet apparatus for the storing of volatile chemicals. This apparatus is a ventilated cabinet for the storing of volatile or poisonous chemicals utilizes a vacuum pump drawing air out of the back of the cabinet to disperse the volatile gases or poisonous gases. In addition, the ventilated cabinet has holes running from front to back within the walls of the cabinet to allow fresh outside air to flow through the cabinet. Thus, any volatile gas buildup from the chemicals in the apparatus will be dissipated.

Abstract: A vacuum pump filter for filtering debris from a semiconductor system is disclosed. The vacuum pump filter includes an inlet port for connecting to a chamber. A first filter holder is connected to the inlet port for filtering large debris. A second filter holder for filtering middle debris is connected to the first filter holder. A third filter holder is connected to the second filter holder for filtering small debris. A outlet port is connected to the third filter holder via a terminal. The other terminal of the outlet port is connected to a pump system.