Patents by Inventor Vince Wilson

Vince Wilson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature controlled showerhead
    Patent number: 10584415
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: March 10, 2020
    Assignee: Novellus Systems, Inc.
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • TEMPERATURE CONTROLLED SHOWERHEAD
    Publication number: 20190256977
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Application
    Filed: March 4, 2019
    Publication date: August 22, 2019
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • Temperature controlled showerhead
    Patent number: 10221484
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Grant
    Filed: September 23, 2016
    Date of Patent: March 5, 2019
    Assignee: Novellus Systems, Inc.
    Inventors: Henner W. Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan
  • TEMPERATURE CONTROLLED SHOWERHEAD
    Publication number: 20170009344
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Application
    Filed: September 23, 2016
    Publication date: January 12, 2017
    Inventors: Henner W. Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan
  • Temperature controlled showerhead
    Patent number: 9476120
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: October 25, 2016
    Assignee: Novellus Systems, Inc.
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • TEMPERATURE CONTROLLED SHOWERHEAD
    Publication number: 20140158792
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Application
    Filed: January 31, 2014
    Publication date: June 12, 2014
    Applicant: Novellus Systems, Inc.
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • Temperature controlled showerhead
    Patent number: 8673080
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: March 18, 2014
    Assignee: Novellus Systems, Inc.
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • Temperature controlled showerhead
    Patent number: 8137467
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Grant
    Filed: October 16, 2007
    Date of Patent: March 20, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • TEMPERATURE CONTROLLED SHOWERHEAD
    Publication number: 20090095220
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Application
    Filed: July 29, 2008
    Publication date: April 16, 2009
    Applicant: NOVELLUS SYSTEMS INC.
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • Temperature controlled showerhead
    Publication number: 20090095219
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Application
    Filed: October 16, 2007
    Publication date: April 16, 2009
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
  • Temperature controlled showerhead
    Publication number: 20090095218
    Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
    Type: Application
    Filed: October 16, 2007
    Publication date: April 16, 2009
    Inventors: Henner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan