Patents by Inventor Vincent Hubert Bernard Gilles Babin

Vincent Hubert Bernard Gilles Babin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS DISTRIBUTION ASSEMBLY INCLUDING POSITIONING DEVICE
    Publication number: 20230069637
    Abstract: A gas distribution assembly and method for reducing the eccentricity between a shower plate and an exhaust duct are disclosed. The gas distribution assembly includes positioning devices configured to reduce misalignment between the shower plate and the exhaust duct. The gas distribution assembly and method can be used to improve uniformity of film deposition thickness.
    Type: Application
    Filed: August 29, 2022
    Publication date: March 2, 2023
    Inventors: Wei Chen Liao, Vincent Hubert Bernard Gilles Babin
  • GAS DISTRIBUTION ASSEMBLY AND METHOD OF USING SAME
    Publication number: 20210254216
    Abstract: A gas distribution assembly and methods for adjusting the gas flow through a gas supply unit into a reaction chamber are disclosed. The gas distribution assembly and methods can be used to increase or decrease gas flow uniformly through the gas supply unit. The gas distribution assembly and methods can also be used to increase gas flow into one area of the reaction chamber, while decreasing gas flow into another area.
    Type: Application
    Filed: February 9, 2021
    Publication date: August 19, 2021
    Inventors: Yukihiro Mori, Vincent Hubert Bernard Gilles Babin, Naoto Tsuji