Abstract: Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source, including a main, first collector stage, with a concave collector mirror placed in front of the source at a distance of greater than 250 mm and pierced by a central hole, and a convex mirror placed behind the concave mirror level with the source and pierced by a central hole, and at least a second collector stage with a concave collector mirror placed in front of the stage and pierced by a central hole and a convex mirror placed behind the concave mirror.

Abstract: Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source (S), comprising a main, first collector stage (E1), with a concave collector mirror (2) placed in front of the source (S) at a distance of greater than 250 mm and pierced by a central hole (3) and a convex mirror (4) placed behind the concave mirror level with the source and pierced by a central hole (5), and at least a second collector stage (E2) with a concave collector mirror (7) placed in front of the stage (E1) and pierced by a central hole (8) and a convex mirror (9) placed behind the concave mirror.

Abstract: In an optical module comprising an arrayed waveguide grating multiplexer-demultiplexer component having at least one inlet waveguide and at least one outlet waveguide, the module is integrated and comprises at least one inlet optical fiber and at least one outlet optical fiber, said inlet waveguide presenting an optical coupling interface with the inlet optical fiber and said outlet waveguide presenting an optical coupling interface with the outlet optical fiber, and a thin film filter is inserted directly at the optical coupling interface between the inlet and/or outlet waveguide(s) of the multiplexer-demultiplexer component and the inlet/outlet optical fiber(s) of the module.