Patents by Inventor Vincent Ruch

Vincent Ruch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
    Patent number: 7033068
    Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: April 25, 2006
    Assignees: Recif, Societe Anonyme, Techsonic
    Inventors: Gil Ching, Vincent Perrut, Vincent Ruch, Gilles Fresquet
  • Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
    Publication number: 20050145263
    Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.
    Type: Application
    Filed: March 4, 2005
    Publication date: July 7, 2005
    Applicants: Recif, Societe Anonyme, Techsonic
    Inventors: Gil Ching, Vincent Perrut, Vincent Ruch, Gilles Fresquet
  • Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
    Patent number: 6880560
    Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: April 19, 2005
    Assignees: Techsonic, Recif, Inc.
    Inventors: Gil Ching, Vincent Perrut, Vincent Ruch, Gilles Fresquet
  • Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
    Publication number: 20040094183
    Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.
    Type: Application
    Filed: November 18, 2002
    Publication date: May 20, 2004
    Applicants: Recif, Societe Anonyme, Techsonic
    Inventors: Gil Ching, Vincent Perrut, Vincent Ruch, Gilles Fresquet