Patents by Inventor Vincent Sermona

Vincent Sermona has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PRECURSORS AND HARDWARE FOR CVD AND ALD
    Publication number: 20080063798
    Abstract: The present invention generally comprises an apparatus for depositing high k dielectric or metal gate materials in which toxic, flammable, or pyrophoric precursors may be used. Exhaust conduits may be placed on the liquid precursor or solid precursor delivery cabinet, the gas panel, and the water vapor generator area. The exhaust conduits permit a technician to access the apparatus without undue exposure to toxic, pyrophoric, or flammable gases that may collect within the liquid deliver cabinet, gas panel, and water vapor generator area.
    Type: Application
    Filed: August 29, 2007
    Publication date: March 13, 2008
    Inventors: Shreyas Kher, Son Nguyen, Pravin Narwankar, Sanjeev Tandon, Steve Jumper, Vincent Sermona