Patents by Inventor Vincente Lim

Vincente Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and methods for controlling process chamber pressure
    Patent number: 6123097
    Abstract: The present invention provides an apparatus and methods for controlling gas pressure within a semiconductor process chamber. The apparatus comprises a throttle valve 32 positioned downstream of the process chamber outlet for controlling gas flow therethrough. The throttle valve includes a valve body 41 having a through-hole and a plug 44 movably disposed within the valve body for controlling gas flow through the through-hole. The throttle valve incorporates an abrasive element 86 disposed within the valve body in abrading contact with an exposed surface 89 of the plug. The abrasive element effectively removes gas deposited onto the exposed surface of the valve plug during operation of the throttle valve.
    Type: Grant
    Filed: June 28, 1996
    Date of Patent: September 26, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Quoc Truong, Imad Yousif, Vincente Lim, Craig Bercaw
  • Silicon carbide constant voltage gradient gas feedthrough
    Patent number: 5725675
    Abstract: A method and apparatus is provided to prevent energy transfer to a gas which is flown through a gas line disposed between a biased member and grounded member. In one aspect of the invention, a semi-conductive sleeve, such as a silicon carbide sleeve, is provided which is disposed about a gas line and is in contact with the gas inlet manifold and the gas outlet manifold and has a resistance less than that of the gas which is flown through the gas line.
    Type: Grant
    Filed: April 16, 1996
    Date of Patent: March 10, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Gary L. Fong, Vincente Lim, Visweswaren Sivaramakrishnan