Patents by Inventor Vinh Lam

Vinh Lam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250169373
    Abstract: A magnetic tunneling junction (MTJ) structure is described. The MJT structure includes a stress modulating layer on a first electrode layer, where a material of the stress modulating layer is different from a material of the first electrode layer. The MJT structure further includes a MTJ material stack on the stress modulating layer. And the MJT structure further includes a second electrode layer on the MTJ material stack. The stress modulating layer reduces crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Application
    Filed: January 17, 2025
    Publication date: May 22, 2025
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Patent number: 12207566
    Abstract: A magnetic tunneling junction (MTJ) structure is described. The MJT structure includes a stress modulating layer on a first electrode layer, where a material of the stress modulating layer is different from a material of the first electrode layer. The MJT structure further includes a MTJ material stack on the stress modulating layer. And the MJT structure further includes a second electrode layer on the MTJ material stack. The stress modulating layer reduces crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Grant
    Filed: July 27, 2023
    Date of Patent: January 21, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Patent number: 11963457
    Abstract: A layered thin film device, such as a MTJ (Magnetic Tunnel Junction) device can be customized in shape by sequentially forming its successive layers over a symmetrically curved electrode. By initially shaping the electrode to have a concave or convex surface, the sequentially formed layers conform to that shape and acquire it and are subject to stresses that cause various crystal defects to migrate away from the axis of symmetry, leaving the region immediately surrounding the axis of symmetry relatively defect free. The resulting stack can then be patterned to leave only the region that is relatively defect free.
    Type: Grant
    Filed: December 12, 2022
    Date of Patent: April 16, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jesmin Haq, Tom Zhong, Zhongjian Teng, Vinh Lam, Yi Yang
  • Publication number: 20230371398
    Abstract: A magnetic tunneling junction (MTJ) structure is described. The MJT structure includes a stress modulating layer on a first electrode layer, where a material of the stress modulating layer is different from a material of the first electrode layer. The MJT structure further includes a MTJ material stack on the stress modulating layer. And the MJT structure further includes a second electrode layer on the MTJ material stack. The stress modulating layer reduces crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 16, 2023
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Patent number: 11785864
    Abstract: A magnetic tunneling junction (MTJ) structure is described. The MJT structure includes a stress modulating layer on a first electrode layer, where a material of the stress modulating layer is different from a material of the first electrode layer. The MJT structure further includes a MTJ material stack on the stress modulating layer. And the MJT structure further includes a second electrode layer on the MTJ material stack. The stress modulating layer reduces crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Publication number: 20230107977
    Abstract: A layered thin film device, such as a MTJ (Magnetic Tunnel Junction) device can be customized in shape by sequentially forming its successive layers over a symmetrically curved electrode. By initially shaping the electrode to have a concave or convex surface, the sequentially formed layers conform to that shape and acquire it and are subject to stresses that cause various crystal defects to migrate away from the axis of symmetry, leaving the region immediately surrounding the axis of symmetry relatively defect free. The resulting stack can then be patterned to leave only the region that is relatively defect free.
    Type: Application
    Filed: December 12, 2022
    Publication date: April 6, 2023
    Inventors: Jesmin Haq, Tom Zhong, Zhongjian Teng, Vinh Lam, Yi Yang
  • Patent number: 11527711
    Abstract: A layered thin film device, such as a MTJ (Magnetic Tunnel Junction) device can be customized in shape by sequentially forming its successive layers over a symmetrically curved electrode. By initially shaping the electrode to have a concave or convex surface, the sequentially formed layers conform to that shape and acquire it and are subject to stresses that cause various crystal defects to migrate away from the axis of symmetry, leaving the region immediately surrounding the axis of symmetry relatively defect free. The resulting stack can then be patterned to leave only the region that is relatively defect free.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: December 13, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jesmin Haq, Tom Zhong, Zhongjian Teng, Vinh Lam, Yi Yang
  • Publication number: 20220384713
    Abstract: A magnetic tunneling junction (MTJ) structure is described. The MJT structure includes a stress modulating layer on a first electrode layer, where a material of the stress modulating layer is different from a material of the first electrode layer. The MJT structure further includes a MTJ material stack on the stress modulating layer. And the MJT structure further includes a second electrode layer on the MTJ material stack. The stress modulating layer reduces crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Application
    Filed: August 10, 2022
    Publication date: December 1, 2022
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Patent number: 11430945
    Abstract: A method for fabricating an improved magnetic tunneling junction (MTJ) structure is described. A bottom electrode is provided on a substrate. A MTJ stack is deposited on the bottom electrode. A top electrode is deposited on the MTJ stack. A first stress modulating layer is deposited between the bottom electrode and the MTJ stack, or a second stress modulating layer is deposited between the MTJ stack and the top electrode, or both a first stress modulating layer is deposited between the bottom electrode and the MTJ stack and a second stress modulating layer is deposited between the MTJ stack and the top electrode. The top electrode and MTJ stack are patterned and etched to form a MTJ device. The stress modulating layers reduce crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: August 30, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Publication number: 20210193915
    Abstract: A layered thin film device, such as a MTJ (Magnetic Tunnel Junction) device can be customized in shape by sequentially forming its successive layers over a symmetrically curved electrode. By initially shaping the electrode to have a concave or convex surface, the sequentially formed layers conform to that shape and acquire it and are subject to stresses that cause various crystal defects to migrate away from the axis of symmetry, leaving the region immediately surrounding the axis of symmetry relatively defect free. The resulting stack can then be patterned to leave only the region that is relatively defect free.
    Type: Application
    Filed: March 8, 2021
    Publication date: June 24, 2021
    Inventors: Jesmin Haq, Tom Zhong, Zhongjian Teng, Vinh Lam, Yi Yang
  • Patent number: 10944049
    Abstract: A layered thin film device, such as a MTJ (Magnetic Tunnel Junction) device can be customized in shape by sequentially forming its successive layers over a symmetrically curved electrode. By initially shaping the electrode to have a concave or convex surface, the sequentially formed layers conform to that shape and acquire it and are subject to stresses that cause various crystal defects to migrate away from the axis of symmetry, leaving the region immediately surrounding the axis of symmetry relatively defect free. The resulting stack can then be patterned to leave only the region that is relatively defect free.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: March 9, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jesmin Haq, Tom Zhong, Zhongjian Teng, Vinh Lam, Yi Yang
  • Publication number: 20200075844
    Abstract: A method for fabricating an improved magnetic tunneling junction (MTJ) structure is described. A bottom electrode is provided on a substrate. A MTJ stack is deposited on the bottom electrode. A top electrode is deposited on the MTJ stack. A first stress modulating layer is deposited between the bottom electrode and the MTJ stack, or a second stress modulating layer is deposited between the MTJ stack and the top electrode, or both a first stress modulating layer is deposited between the bottom electrode and the MTJ stack and a second stress modulating layer is deposited between the MTJ stack and the top electrode. The top electrode and MTJ stack are patterned and etched to form a MTJ device. The stress modulating layers reduce crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Application
    Filed: November 11, 2019
    Publication date: March 5, 2020
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Patent number: 10475987
    Abstract: A method for fabricating an improved magnetic tunneling junction (MTJ) structure is described. A bottom electrode is provided on a substrate. A MTJ stack is deposited on the bottom electrode. A top electrode is deposited on the MTJ stack. A first stress modulating layer is deposited between the bottom electrode and the MTJ stack, or a second stress modulating layer is deposited between the MTJ stack and the top electrode, or both a first stress modulating layer is deposited between the bottom electrode and the MTJ stack and a second stress modulating layer is deposited between the MTJ stack and the top electrode. The top electrode and MTJ stack are patterned and etched to form a MTJ device. The stress modulating layers reduce crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Grant
    Filed: May 1, 2018
    Date of Patent: November 12, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Publication number: 20190341542
    Abstract: A method for fabricating an improved magnetic tunneling junction (MTJ) structure is described. A bottom electrode is provided on a substrate. A MTJ stack is deposited on the bottom electrode. A top electrode is deposited on the MTJ stack. A first stress modulating layer is deposited between the bottom electrode and the MTJ stack, or a second stress modulating layer is deposited between the MTJ stack and the top electrode, or both a first stress modulating layer is deposited between the bottom electrode and the MTJ stack and a second stress modulating layer is deposited between the MTJ stack and the top electrode. The top electrode and MTJ stack are patterned and etched to form a MTJ device. The stress modulating layers reduce crystal growth defects and interfacial defects during annealing and improve the interface lattice epitaxy. This will improve device performance.
    Type: Application
    Filed: May 1, 2018
    Publication date: November 7, 2019
    Inventors: Jesmin Haq, Tom Zhong, Vinh Lam, Vignesh Sundar, Zhongjian Teng
  • Publication number: 20190148630
    Abstract: A layered thin film device, such as a MTJ (Magnetic Tunnel Junction) device can be customized in shape by sequentially forming its successive layers over a symmetrically curved electrode. By initially shaping the electrode to have a concave or convex surface, the sequentially formed layers conform to that shape and acquire it and are subject to stresses that cause various crystal defects to migrate away from the axis of symmetry, leaving the region immediately surrounding the axis of symmetry relatively defect free. The resulting stack can then be patterned to leave only the region that is relatively defect free.
    Type: Application
    Filed: November 13, 2017
    Publication date: May 16, 2019
    Inventors: Jesmin Haq, Tom Zhong, Zhongjian Teng, Vinh Lam, Yi Yang
  • Patent number: 8524511
    Abstract: A CMOS device is provided in a substrate. A magnetic tunnel junction (MTJ) is provided over the CMOS device and connected to the CMOS device by a metal ring contact wherein a dielectric or other filling material forms the center of the metal ring contact and wherein a bottom of the metal ring contact underlying said filling material is metal.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: September 3, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Tom Zhong, Vinh Lam, Zhongjian Teng
  • Patent number: D819208
    Type: Grant
    Filed: August 12, 2016
    Date of Patent: May 29, 2018
    Assignee: W.S. INDUSTRIES, INC.
    Inventor: Vinh Lam
  • Patent number: D1120501
    Type: Grant
    Filed: June 29, 2023
    Date of Patent: March 24, 2026
    Inventor: Vinh Lam
  • Patent number: D1120502
    Type: Grant
    Filed: June 29, 2023
    Date of Patent: March 24, 2026
    Inventor: Vinh Lam