Abstract: Electrical energy storage and discharge system for storing electrical energy as thermal energy includes a heat pump cycle with first working fluid, a water steam cycle with second working fluid, a first thermal storage system with first thermal fluid, a second thermal storage system with second thermal fluid, an electrical heater member and a power regulating member, fluidly connected to each other. The system includes fluidly connected first cold and hot storage tanks, and the system includes fluidly connected second cold and hot storage tanks. The electrical heater is operably connected to the system between the tanks. The power regulating member is electrically connected to one or more electrical sources to regulate excess electrical energy, partially, to the electrical heater, and partially, to the heat pump cycle.

Abstract: A solar thermal power plant comprises a solar radiation receiver mounted on a tower surrounded by a heliostat field to receive solar radiation reflected by heliostats. A power generation circuit includes a steam turbine for driving an electrical generator to produce electrical power, and water in the power generation circuit is heated directly by solar radiation reflected onto the solar radiation receiver by the heliostat field to generate steam to drive the steam turbine. An energy storage circuit includes a thermal energy storage fluid, such as molten salt, which is capable of being heated directly by solar radiation reflected by the heliostat field. A heat exchanger is also provided for recovering thermal energy from the thermal energy storage fluid. The recovered thermal energy may then be used to generate steam to drive the steam turbine.

Abstract: An optical collector (15) for collecting extreme ultraviolet radiation or EUV light generated at a central EUV production site comprises a reflective shell (25). To cope with thermal loading of the collector and avoid deformations, the reflective shell (25) is mounted on a support structure (24), such that a cooling channel (29) is established between the back side of the reflective shell (25) and the support structure (24), the thickness of the reflective shell (25) is substantially reduced, such that the convective heat transfer between the back side of the reflective shell (25) and a cooling medium (26) flowing through the cooling channel (29) dominates the process of removing heat from the reflective shell (25) with respect to heat conduction, and a cooling circuit (33) is connected to the cooling channel (29); to supply a cooling medium (26) to the cooling channel (29) with a controlled coolant pressure and/or mass flow.

Abstract: Electrical energy storage and discharge system for storing electrical energy as thermal energy includes a heat pump cycle with first working fluid, a water steam cycle with second working fluid, a first thermal storage system with first thermal fluid, a second thermal storage system with second thermal fluid, an electrical heater member and a power regulating member, fluidly connected to each other. The system includes fluidly connected first cold and hot storage tanks, and the system includes fluidly connected second cold and hot storage tanks. The electrical heater is operably connected to the system between the tanks. The power regulating member is electrically connected to one or more electrical sources to regulate excess electrical energy, partially, to the electrical heater, and partially, to the heat pump cycle.

Abstract: A solar thermal power plant includes a solar radiation receiver mounted on a tower surrounded by a heliostat field to receive solar radiation reflected by heliostats forming the heliostat field. The power plant includes a power generation circuit including a steam turbine for driving an electrical generator to produce electrical power, and water in the power generation circuit is capable of being heated directly by solar radiation reflected onto the solar radiation receiver by the heliostat field to generate steam to drive the steam turbine. The power plant also includes an energy storage circuit including a thermal energy storage fluid, such as molten salt, which is capable of being heated directly by solar radiation reflected by the heliostat field. A heat exchanger is also provided for recovering thermal energy from the thermal energy storage fluid in the energy storage circuit; the recovered thermal energy may then be used to generate steam to drive the steam turbine.

Abstract: An optical collector (15) for collecting extreme ultraviolet radiation or EUV light generated at a central EUV production site comprises a reflective shell (25). To cope with thermal loading of the collector and avoid deformations, the reflective shell (25) is mounted on a support structure (24), such that a cooling channel (29) is established between the back side of the reflective shell (25) and the support structure (24), the thickness of the reflective shell (25) is substantially reduced, such that the convective heat transfer between the back side of the reflective shell (25) and a cooling medium (26) flowing through the cooling channel (29) dominates the process of removing heat from the reflective shell (25) with respect to heat conduction, and a cooling circuit (33) is connected to the cooling channel (29); to supply a cooling medium (26) to the cooling channel (29) with a controlled coolant pressure and/or mass flow.