Patents by Inventor Vitally Prosyentsov

Vitally Prosyentsov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Patent number: 8243259
    Abstract: A substrate stage for an immersion type lithographic apparatus is arranged to project a patterned radiation beam from a patterning device onto a substrate, the substrate stage being constructed to hold the substrate and including at least a sensor for sensing the patterned radiation beam, the sensor including an at least partially transmissive layer having a front side facing the incoming radiation beam and a back side opposite the front side, wherein the back side is provided with at least a sensor mark to be subjected to the radiation beam transmitted through the layer.
    Type: Grant
    Filed: June 17, 2009
    Date of Patent: August 14, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Vitally Prosyentsov, Sanjaysingh Lalbahadoersing, Sami Musa, Hyun-Woo Lee