Patents by Inventor Vitaly E. Lisitsyn

Vitaly E. Lisitsyn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for applying film coatings onto substrates in vacuum
    Patent number: 4961832
    Abstract: The apparatus for applying film coatings onto substrates in vacuum comprises a vacuum working chamber with a holder of substrates and magnetron material sputtering units, an evacuation chamber equipped with magnetron pump and communicating with a gas source, a pre-evacuation pump, an auxiliary evacuation chamber with a magnetron pump, an auxiliary gas source and a system of conduits. The system includes a conduit equipped with a control valve, communicating the auxiliary gas source with the auxiliary evacuation chamber, and two conduits each with its control valve, communicating the respective gas sources with the working chamber.
    Type: Grant
    Filed: March 14, 1989
    Date of Patent: October 9, 1990
    Inventors: Vladimir A. Shagun, Vladimir A. Domrachev, Pavel S. Balykin, Jury V. Sokolov, Vitaly E. Lisitsyn, Vladimir P. Petrakov