Patents by Inventor Vitaly K. Rerikh

Vitaly K. Rerikh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser-sustained plasma light source with reverse vortex flow
    Patent number: 11776804
    Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
    Type: Grant
    Filed: March 16, 2022
    Date of Patent: October 3, 2023
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Vitaly K. Rerikh, Boris Vasilyevich Potapkin
  • LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX FLOW
    Publication number: 20220344146
    Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
    Type: Application
    Filed: March 16, 2022
    Publication date: October 27, 2022
    Inventors: Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Vitaly K. Rerikh, Boris Vasilyevich Potapkin