Patents by Inventor Vitaly NESTEROV

Vitaly NESTEROV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CYCLIC GERMANIUM SILYLAMIDO PRECURSORS FOR GE-CONTAINING FILM DEPOSITIONS AND METHODS OF USING THE SAME
    Publication number: 20210032275
    Abstract: Methods for forming a Ge-containing film on a substrate comprise the steps of introducing a vapor of a cyclic Ge(II) silylamido precursor into a reactor having the substrate disposed therein and depositing at least part of the cyclic Ge(II) silylamido precursor onto the substrate to form the Ge-containing film using a vapor deposition method. The cyclic Ge(II) silylamido precursor is [SiMe3-(N—)—SiMe2-(N—)—SiMe3]Ge(II) or [tBu-(N—)—SiMe2-(N—)-tBu]Ge(II).
    Type: Application
    Filed: July 30, 2020
    Publication date: February 4, 2021
    Inventors: Naohisa NAKAGAWA, Jean-Marc GIRARD, Raphael ROCHAT, Takio KIZU, Jonathan MA, Vitaly NESTEROV